|
Spares from: SVG, SVG Thermco (Aviza), |
| SVG | ||
| Part No. not known | Tubing 1.58mm 1/16", Red Polyurethane 100'",," Red Polyurethane 100'" |
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| 06-262-24C | PCB PRE-AMP CENTRE MET |
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| 06-32331-00 | SHAFT. DEVELOPER |
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| 06-95039 | HEATER JACKET FLA |
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| 06-95076-02 | VALVE VACUUM 2-S |
 |
06710-01 | Guide, DEV shield |
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088056-00 | Lamp, ultra-violet, ozone |
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| 0923001EO1 | FUSEHOLDER SVG |
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| 103-6388 | TRANSISTOR. POWER. |
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109-003 | Switch, Air Pressure |
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109-102 | Relay, solid state, 90-280V input, 240VAC 25Amp output switch |
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| 111-002 | LIGHT BULB 6 VOLT |
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112007 | Brushes for SVG 11 |
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| 114-024 | VALVE SOLENOID 024 SVG |
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| 114-025 | VALVE SOLENOID 025 SVG |
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| 114-045 | VALVE. DEVELOP CAR |
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| 11959-01 | INSERT. CATCH CUP |
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120-296-000 | Circlip External 7 x 0.1 (0.275" x 0.04") |
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| 121-031 | RFRGRATED COOL FLO |
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121115 | Thermocouple, Torch |
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122-295-170 | Water Connection |
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| 122499-001 | INJECTOR VLTO 02 MASTER |
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| 122500-001 | INJECTOR VLTO 02 SLAVE |
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| 122501-001 | INJECTOR VLTO S1H4 MASTER |
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| 122502-001 | INJECTOR VLTO S1H4 SLAVE |
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13408/04 | Chuck, wafer, MHP, 150mm |
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| 141250-001 | TAPE DRIVE THERMCO |
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14506-01 | NOZZLE. BATH TIP P |
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| 14508-01 | PIVOTING. TUB DUNK |
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14510-01 | Shaft, bath pivot |
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| 147298-001 | POWER SUPPLY THERMCO (9035 |
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| 15389-01 | RESIST COATER. CAT |
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| 15851-01 | CUP RINSE. ROSS |
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| 16111-02 | SHAFT. DEVELOPER |
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| 16195-01 | Coupling, Modified Rev A |
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| 17-05114 | KIT EXTENDER CARD SVG |
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| 17-16813-01 | KIT. EXTENDER PCB |
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| 17215-01 | CATCH CUP SOG TOP |
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| 17215-02 | CATCH CUP TOP PIVO |
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| 18258-01 | SPINDLE. DOWN STOP |
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| 19108-01 | CHUCK. SCRUB.1 |
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| 2-016 | O-Ring 15.6x1.78 Viton |
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| 2-110 | O-Ring 9.19x2.62 Polyurethane |
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| 2-131 | O-Ring 1.674x0.103" BS131 Polyurethane Jointed |
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201-007 | Seal, bushing ball, 3/8" |
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| 201-093 | WHEEL GUIDE RAIL S |
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201-095 | Bushing, wheel guide |
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| 20118-001-127 | METER DEVIATION 25025A |
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| 20118-10-168 | METER POWER INPUT |
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| 202-003 | O-Ring 1.8x0.103" Polyurethane Jointed |
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202-023 | O-Ring 0.103x2.0 |
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| 202-161 | O-Ring 2-178 247.32x2.62 SVG |
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| 202-186 | O-Ring 2-171 202.87x2.62 SVG |
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| 202/278 | BELT GEAREG PULLEY |
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| 203-020 | Cylinder SVG P/C pump |
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205-252 | Bumper, lift plate |
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| 209-102 | FLOAT SWITCH |
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| 213-015 | VALVE. MRTG. 1/8 N |
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| 213-042 | VALVE P/C 042 SVG |
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213-139 | Valve, 3 way, pneumatic, teflon |
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214-095 | Spacer 12 X 18 X 0 |
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215-156 | Coupling, rigid |
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219-093 | Magnet pump, 220V/240V, 50/60Hz, 0.55Amps |
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| 220-026 | PULLEY 026 SVG |
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2421805EO1 | Transformer, 230/115v input, 16V/1.5A or 8v 3A output |
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2421806EO1 | Transformer, 230/115v input, 12.6V/2A or 6.3v 4A output |
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| 3221488EO1 | Shaft Seal 0.88/0.50x0.125" (22.35/12.7x3.175) for Ball Bushing |
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| 3221492EO1 | V-Ring 20/14x5.5 V 16 A |
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| 3221494EO1 | Shaft Seal 6/11x3.5 PTFE |
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| 3221495EO1 | Gasket Seal 11/39x1 VP CARRIER SVG |
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| 3222162EO1 | O-Ring 2-165 SVG |
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| 3222178EO1 | O-Ring 2-166 POLYURETHANE |
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| 3224654EO1 | Gasket Seal 10/16x1.78 VPO SHAFT SVG |
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4521547EO1 | PULLEY 027 SVG |
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500454-001 | Coupling, universal, Encoder ML-18-A T |
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5121678EO1 | Valve, check, 1/8" lift (Swagelock/Whitey) |
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| 5921709EO1 | BRUSH MOTOR SVG 007 |
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| 600051-01 | PCB ANALOGUE INPUT VTR |
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| 600053-01 | PCB ANALOG OUTPUT |
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| 604101 | CATCH CUP BOTTOM |
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| 6421725EO1 | CONTROL PANEL SVG PC |
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| 6421726EO1 | CONTROL PANEL SVG SSC |
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| 644-0327-014 | DRIVE CARRIAGE ASSY PE |
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| 644-0751-001 | PCB PREAMP GAIN 1MM PE |
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| 644-4509-004 | GEAR CARR DRIVE PE |
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644-5567-002 | Carriage DR isolator PE |
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| 644-6813 | Block aligner 6813 PE |
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| 672801 | SPINDLE. LIFT PLAT |
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| 673408 | CHUCK. DEVELOPER |
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677-0483-001 | Disc Encoder |
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677-0551 | Carrier Mask 5" x 5" x 090 |
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680-0130-017 | Heater |
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681-0023-010 | Lamp:RF interface |
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681-0023-013 | Lamp : AC |
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681-0117-010 | Thermostat |
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| 681-0191-001 | feedthrough Housing |
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682-0033-001 | O-Ring |
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682-0038-075 | Ferrule |
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682-0039-003 | PCB |
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682-0049-044 | Retaining Ring |
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| 682-0072-003 | SHAFT WORM CARR DRIVE PE |
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682-0079-005 | Flat Washer |
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| 682-0135-002 | WORM CARR DRIVE PE |
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682-0148-111 | Spherical washer |
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| 682-0159-009 | CLAMP PRESSURE SHAFT PE |
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682-0170-502 | Filter Element |
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682-0218-006 | Hose Barb 10-32 |
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682-0249-002 | 3 way Air Valve Northeast fluidics model 2010 |
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682-0347-005 | BNDG head screw 6-32 |
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682-0352-001 | Lock Nut |
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682-0352-002 | Lock Washer |
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682-0354-001 | Rad bearing console |
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682-0357-001 | Flanged Bearing |
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| 6838-9410-0 | DIODE TEM 10D8 1W 800V 25 |
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688-0085-000 | 6-32 1/4 Inch Long |
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688-0407-000 | Screw Clamp |
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688-0480-000 | Screw |
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| 690-1298-002 | FILTER PE600 FIBRE BUNDLE |
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690-4217-001 | Actuator, Mask transport latch |
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690-4473-001 | Filter Hepa PE600 |
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698-0215-002 | Valve load mode Isolator |
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698-0439-003 | Stand Connect RF |
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698-0456-001 | Photomultiplier Hammamatsu C1053-05 |
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698-0786-001 | Actuator Detector cable |
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698-1838-001 | Window Vacuum Chamber |
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698-1867-001 | Friction pad |
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698-1872-001 | Starter clamp inductor |
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698-1969-002 | Insulator base plate |
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698-1970-001 | Insulator chuck ring |
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698-1973-002 | Insulating Sleeves |
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698-1976-002 | Gas Distribution Plate |
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698-2046-001 | Lift pins |
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698-2157-003 | Insulating bushing |
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| 698-2173-003 | Clamping corner |
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698-2229-001 | Insulating cap |
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698-2267-001 | Vent Bushing |
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698-2290-001 | Annular transparent ring |
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698-2314-001 | Insulator : bottom |
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| 698-2381-001 | Insulator Window |
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698-9061-001 | PCB ISBC 534 Communication Expansion board 942-6115-002 |
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698-9105-004 | PCB Endpoint |
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698-9114-001 | Control Tickler |
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698-9118-001 | PCB Aligner Control |
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698-9447-001 | Cable assy |
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| 698-9474-001 | Box assembly EPD s/n 041 |
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6980803002 | PCB Driver |
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6981701001 | PCB Assy. Pneumatic |
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| 698198002 | MATEL O-RING |
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6989062001 | PCB CM126A memory |
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|
7190 | Rule, notched UL90 |
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| 7829561EO1 | KIT SVG BELT (Motorola seal kit) |
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|
80157F | ATS Controller (Transport Arm) |
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| 869-8000-002 | HARNESS ASSY 6F MASK TRANS |
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901710-002 | Switch, push button, SPDT (THERMCO MUX RESET) |
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| 901975-002 | VALVE GATE ASSY |
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| 904177-001 | VOLTMETER THERMCO CVD |
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| 905109-001 | BELLOWS VLTO GATE VALVE |
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| 906649-001 | POWER SUPPLY CB24-6 THERMCO |
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| 90X2731 | |
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| 917-00 | MOTOR ASSY OIL FILTRATION |
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942-0207.001 | Thermocouple |
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942-0226-001 | Gas shut off valve NUPRO SS-4BK V51-1C |
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942-0236-001 | Valve Ball PM Assy |
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942-0237-001 | Leaf Spring Validyne P305D |
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942-0245-001 | Filter |
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942-0251-001 | Fan from Kooltronic 7163-2466 |
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942-0252-001 | Fan filter |
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942-1014-001 | Magnet Bracket |
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942-1034-001 | Cup Flexure |
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942-1036-001 | Arm Wafer Presence |
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942-1069-001 | Bellows lift and loc |
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942-1173-001 | Spring Reel Assy |
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942-1282-001 | Bellow Block Housing |
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942-1283-001 | Guide Bellow Block H 942-2528-101 |
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942-2017-001 | Flexure Wafer ASM |
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942-2023-001 | Lower finger part |
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942-2026-001 | Adjusting nut |
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942-2033-001 | MTG Plate Elevator Shel |
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942-2037-001 | Wafer present sensor |
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942-2051-001 | Screw Cover |
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942-2111-001 | Sensor Stud Mount |
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942-2112-001 | Magnet Bar Mount |
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942-2113-001 | Sensor Mount |
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942-2114-001 | Sensor bracket |
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942-2121-001 | L.S. trip bracket |
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942-2194-001 | Electrode housing |
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942-2197-001 | Clamp |
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942-2198-001 | Electrode Base |
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942-2199-001 | Pin electrode |
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942-2200-001 | Electrode House Pin |
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942-2201-001 | Electrode insulator |
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942-2204-001 | Gasket |
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942-2206-001 | Feedthrough Housing |
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942-2299-001 | Window |
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942-2386-001 | Union |
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942-5001-300 | Control Auto Zero Box |
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942-5002-300 | PCBD End Stop |
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942-5007-300 | PCB servo position |
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942-5009-300 | PCB Power Regulator Low |
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942-6112-001 | N2 Purge Valve Assy D2016-S33 10Watts 24VDC |
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942-6185-001 | Chassis to Digital |
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942-6215-001 | PCB BOARD |
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942-6326-001 | Solenoid Elec. Nupro. Angar scientific 4093M224120N0 |
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942-6432-001 | PCB memory |
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942-6474-001 | 400KHZ matching |
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942-6503-001 | Power Cable |
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942-6517-001 | Filter Strain Gauge |
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942-6518-001 | Filter |
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942-6651-001 | Memory circuit set |
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99-00303 | Pulley assembly (with bearing) 303 SVG |
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99-04089 | Thermocouple probe |
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| 99-06635-06 | Air Ring assembly, CTD, 150mm |
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| 99-14089-02 | Assembly, MICRO STEP DR |
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| 99-15742-02 | CST ELEM HTR. HTR |
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| 99-16594-02 | ELEMENT. HEATER VP |
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| 99-16883-02 | Assembly, BLOCK HPO MA |
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| 99-504181-02-002 | Assembly, PWR SPLY DP |
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| 99-80039-07 | INDEXER INTERFACE. |
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| 99-80068 | PCB SPEED CONTROL SVG |
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| 99-80137 | PCB. HANDLER INTER |
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99-80157-01 | ATS Controller (Transport Arm) |
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| 9980115-01 | Assembly, SPDL CNTL 2T |
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| Blue Polyurethane | Tubing 1.58mm 1/16", Blue Polyurethane |
|
|
HPO 1 | Thermocouple |
|
| MV30-1657-60 | LINER FURNACE MULLITE |
|
| not known | Kit, upgrade for linear bearings/shafts on all 8626, 8642, 8826, SMC, and 8842 pKIT |
|
| OL-327 | Lamp, 28V, 40mA, G1736, OL327 |
|
|
PT-33 | Gasket |
|
| S100701-01 | Belt, timing 6R3-174037 BEU VTR THERMC |
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| T111/046 | FUSE,1/4A, 250V, SB,3AG'OR |
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| T15752/01 | BUSHING CCR |
|
| T202/254 | TIMING BELT C5-6-4 |
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T207/004 | Gasket |
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| T99/80000/01 | Assembly, SINGLE .25 MA SENSOR PCB |
| SVG THERMCO (AVIZA) | ||
|
| 101560-01 | O-Ring MF 80 |
|
| 104090-02 | Spacers .090 thick |
|
| 600768-01 | Deadman Switch |
