Spares from: SVG, SVG Thermco (Aviza), |
SVG | |||
Part No. not known | Valve, check, 1/8" lift (Swagelock/Whitey) | ||
Part No. not known | Transformer, 230/115v input, 12.6V/2A or 6.3v 4A output | ||
Part No. not known | Transformer, 230/115v input, 16V/1.5A or 8v 3A output | ||
06-262-24C | PCB, Pre-amp Centre MET | ||
06-32331-00 | Shaft, developer | ||
06-95076-02 | Valve, Vacuum 2-S | ||
06710-01 | Guide, DEV shield | ||
06719-01 | Seal, top | ||
06728-01 | Spindle, Lift Plat | ||
088056-00 | Lamp, ultra-violet, ozone | ||
0923001EO1 | Fuse holder, SVG | ||
103-6388 | Transistor, PNP, Darlington, 120V, 50A | ||
107-004 | Relay, 24VDC, 3PDT (3pole c/o), 10A@240VAC | ||
109-003 | Switch, Air Pressure | ||
109-102 | Relay, Solid State, 90-280V Input, 240VAC, 25A, Output Switch | ||
111-002 | Lamp, 6V | ||
111/046 | Fuse, 250mA, 250V, SB | ||
112-007 | Brush, for SVG 11 | ||
114-024 | Valve, Solenoid 024 SVG, N3201A, 24VDC, 8.5W | ||
114-025 | Valve, Solenoid 025, 24VDC, 8.5W, 0-100 PSIG, MINI-MYTE | ||
114-045 | Valve, Develop Car | ||
11959-01 | Insert. Catch Cup | ||
120-296-000 | Circlip, External 7 x 0.1 (0.275" x 0.04") | ||
121115 | Thermocouple, Torch | ||
122-295-170 | Water Connection | ||
122900-001 | Boat Loader Board | ||
13408/04 | Chuck, wafer, MHP, 150mm | ||
141250-001 | Tape Drive Thermco | ||
14506-01 | Nozzle, Bath tip P | ||
14508-01 | Pivoting tub DUNK | ||
14510-01 | Shaft, bath pivot | ||
147298-001 | Power Supply, Thermco, 115VAC, 24V, 2A o/p | ||
15389-01 | Resist Coater CAT | ||
15752/01 | Bushing, CCR | ||
15851-01 | Cup, Rinse. ROSS | ||
16111-02 | Shaft, Developer | ||
16188-01 | Pin, Wafer chill PLT | ||
16195-01 | Coupling, Modified Rev A | ||
16217-01 | Pin, Wafer HPD | ||
16269-01 | Arc shaft | ||
17-05114 | PCB, Extender Card | ||
17-16813-01 | PCB, Extender card | ||
17-46132-01 | Kit, upgrade for linear bearings/shafts on all 8626, 8642, 8826, SMC, and 8842 pivoting mo inb dispense systems | ||
17215-01 | Catch Cup Sog Top | ||
17215-02 | Catch Cup Top pivot | ||
17276-01 | Nut, locking, knurled | ||
17530/02 | Nozzle | ||
18258-01 | Spindle, down stop | ||
19108-01 | Chuck, Scrub 1 | ||
201-007 | Seal, bushing ball, 3/8" | ||
201-093 | Wheel, Guide rail S | ||
201-095 | Bushing, wheel guide | ||
20118-10-168 | Meter, Power input | ||
202-003 | O-Ring, 40x2.5, 1.8x0.103" Polyurethane Jointed | ||
202-023 | O-Ring, 52.07x2.62, Polyurethane | ||
202-161 | O-Ring, 247.32x2.62 SVG | ||
202-186 | O-Ring, 202.87x2.62 SVG | ||
202/254 | Belt, timing, C5-6-4 | ||
202/278 | Belt, Geareg Pulley, | ||
202/283 | O-ring, 2x2, Teflon | ||
203-020 | Cylinder, SVG P/C pump | ||
205-252 | Bumper, lift plate | ||
205-453 | Washer, curved, spring. 3/8"id, 7/8"od | ||
206/001 | Adaptor, brass | ||
206/247 | Ferrule, coater, teflon | ||
206/468 | Quick disconnect coupling | ||
206/470 | Coupling | ||
206/490 | Quick disconnect coupling insert | ||
206/621 | Quick disconnect coupling | ||
206/666 | Elbow, 10-32x1/8T, Barb Nylon | ||
206/850 | Coupling, flexible with clamps | ||
207/004 | Gasket | ||
209-102 | Switch, Float | ||
212-002 | Tubing 1.58mm 1/16", Blue Polyurethane | ||
212/013 | Tubing, Polyurethane, Red, 1/8" OD, 1/16 ID, 100' | ||
213-015 | Valve, MRTG. 1/8 N | ||
213-042 | Valve, P/C 042 SVG | ||
213-139 | Valve, 3way, pneumatic, teflon | ||
214-095 | Spacer, 12 X 18 X 0 | ||
215-156 | Coupling, rigid | ||
219-093 | Pump, Magnet, 220V/240V, 50/60Hz, 0.55A | ||
220-026 | Pulley, 026 SVG | ||
322114EO1 | O-Ring, 9.19x2.62 Polyurethane | ||
3221488EO1 | Shaft Seal 0.88/0.50x0.125" (22.35/12.7x3.175) for Ball Bushing | ||
3221492EO1 | V-Ring 20/14x5.5 V 16 A | ||
3221494EO1 | Shaft Seal 6/11x3.5 PTFE | ||
3221495EO1 | Gasket, Seal 11/39x1 VP Carrier SVG | ||
3222115EO1 | O-Ring, 15.6x1.78, Viton | ||
3222162EO1 | O-Ring, 164.77x2.62, jointed Polyurethane | ||
3222163EO1 | O-Ring, 35x2.5, 1.674x0.103" Jointed Polyurethane | ||
3224654EO1 | Gasket, Seal 10/16x1.78 VPO Shaft SVG | ||
4521547EO1 | Pulley, 027 SVG | ||
500454-001 | Coupling, universal, Encoder ML-18-A T | ||
5921709EO1 | Brush, Motor SVG 007 | ||
600051-01 | PCB, Analogue input VTR | ||
600053-01 | PCB, Analogue output | ||
604101 | Catch Cup Bottom | ||
6421725EO1 | Panel, control PC | ||
6421726EO1 | Panel, control SSC | ||
644-0327-014 | Drive Carriage Assy PE, Type- HEM 3512-12, 1000 cycles, | ||
644-0751-001 | PCB, Pre-amp gain 1mm PE | ||
644-4509-004 | Gear, carriage drive PE | ||
644-5567-002 | Carriage DR isolator PE | ||
644-6813 | Block aligner 6813 PE | ||
673408 | Chuck, developer | ||
677-0483-001 | Disc Encoder | ||
677-0551 | Carrier, Mask 5" x 5" x 090 | ||
680-0130-017 | Heater | ||
681-0023-010 | Lamp, RF interface | ||
681-0023-013 | Lamp, AC | ||
681-0117-010 | Thermostat | ||
681-0191-001 | Feedthrough Housing | ||
682-0033-001 | O-Ring, 2.9x1.78, Nitrile | ||
682-0038-075 | Ferrule | ||
682-0049-044 | Ring, retaining | ||
682-0072-003 | Shaft, worm carriage drive, PE | ||
682-0079-005 | Flat Washer | ||
682-0135-002 | Worm carriage drive PE | ||
682-0148-111 | Spherical Washer | ||
682-0159-009 | Clamp, Pressure shaft PE | ||
682-0170-502 | Filter, Element | ||
682-0218-006 | Hose Barb 10-32 | ||
682-0249-002 | Valve, Air, 3way Northeast Fluidics Model 2010 | ||
682-0352-001 | Nut, Lock | ||
682-0352-002 | Washer, Lock | ||
682-0354-001 | Rad Bearing Console | ||
682-0357-001 | Flanged Bearing | ||
6838-9410-0 | Diode, TEM 10D8 1W 800V 25 | ||
688-0085-000 | 6-32 1/4 Inch Long | ||
688-0407-000 | Screw, Clamp | ||
688-0480-000 | Screw | ||
690-1298-002 | Filter, PE600 Fibre bundle | ||
690-4217-001 | Actuator, Mask transport latch | ||
690-4473-001 | Filter, Hepa PE600 | ||
698-0215-002 | Valve, load mode Isolator | ||
698-0439-003 | Stand Connect RF | ||
698-0456-001 | Photomultiplier Hammamatsu | ||
698-0786-001 | Actuator Detector cable | ||
698-1838-001 | Window Vacuum Chamber | ||
698-1867-001 | Friction pad | ||
698-1872-001 | Starter Clamp Inductor | ||
698-1969-002 | Insulator, Base Plate | ||
698-1970-001 | Insulator, chuck ring | ||
698-1973-002 | Insulating Sleeves | ||
698-1976-002 | Gas Distribution Plate | ||
698-2046-001 | Lift Pins | ||
698-2157-003 | Insulating Bushing | ||
698-2173-003 | Clamping Corner | ||
698-2229-001 | Insulating Cap | ||
698-2267-001 | Vent Bushing | ||
698-2290-001 | Annular Transparent Ring | ||
698-2314-001 | Insulator : Bottom | ||
698-2381-001 | Insulator, Window | ||
698-9061-001 | PCB, ISBC 534 Communication Expansion Board 942-6115-002 | ||
698-9062-001 | PCB, CM126A memory | ||
698-9105-004 | PCB, Endpoint | ||
698-9447-001 | Cable, Assy | ||
698-9474-001 | Box Assembly EPD s/n 041 | ||
6980803002 | PCB, Driver | ||
6981701001 | PCB, Assy. Pneumatic | ||
698198002 | Matel O-Ring | ||
7190 | Rule, notched UL90 | ||
7829561EO1 | Kit, Belt (Motorola seal kit) | ||
80-146A | PCB, Vacuum Delay | ||
80103D2-30 | PCB, CPU, 86/88, HCIU STD W/O EP, 80103D 80103D2-30 | ||
80122C3-04 | SVG Track Interface Board, 80122 or 99-71122A | ||
80157F | ATS Controller (Transport Arm) | ||
869-8000-002 | Harness Assy 6F Mask Trans | ||
901710-002 | Switch, push button, SPDT (Thermco MUX RESET) | ||
901975-002 | Valve, Gate, 1 1/2inch opening, Pneumatic, S/Steel, | ||
904177-001 | Voltmeter Thermco CVD | ||
905109-001 | Gate Valve, Bellows, ASST, 50mm, VLTO | ||
906649-001 | Power Supply, CB24-6, 85-132VAC, o/p 24VDC@6.5A, Thermco | ||
908596-002 | Heater Jacket, FLA | ||
908600-001 | Heater Jacket, FLA | ||
90X2731 | |||
942-0207.001 | Thermocouple | ||
942-0226-001 | Valve, Gas Shut Off, NUPRO SS-4BK V51-1C | ||
942-0236-001 | Valve, Ball PM Assy | ||
942-0237-001 | Pressure Transducer, Validyne P305D | ||
942-0245-001 | Filter | ||
942-0251-001 | Fan, from Kooltronic - Motor 7163-2466 | ||
942-0252-001 | Fan, Filter | ||
942-1014-001 | Magnet Bracket | ||
942-1034-001 | Cup Flexure | ||
942-1036-001 | Arm Wafer Presence | ||
942-1069-001 | Bellows lift and loc | ||
942-1173-001 | Spring, Reel Assy | ||
942-1282-001 | Bellow Block Housing | ||
942-1283-001 | Guide, Bellow Block H 942-2528-101 | ||
942-2017-001 | Flexure Wafer ASM | ||
942-2023-001 | Lower Finger Part | ||
942-2026-001 | Adjusting Nut | ||
942-2033-001 | MTG Plate Elevator Shel | ||
942-2037-001 | Wafer Present Sensor | ||
942-2051-001 | Screw, Cover | ||
942-2111-001 | Sensor, Stud Mount | ||
942-2112-001 | Magnet Bar Mount | ||
942-2113-001 | Sensor, Mount | ||
942-2114-001 | Sensor Bracket | ||
942-2121-001 | L.S. Trip Bracket | ||
942-2194-001 | Electrode Housing | ||
942-2197-001 | Clamp | ||
942-2198-001 | Electrode Base | ||
942-2199-001 | Pin, Electrode | ||
942-2200-001 | Electrode House Pin | ||
942-2201-001 | Insulator, Electrode | ||
942-2204-001 | Gasket | ||
942-2206-001 | Feedthrough Housing | ||
942-2299-001 | Window | ||
942-2386-001 | Union | ||
942-5001-300 | Control Auto Zero Box | ||
942-5002-300 | PCB, End Stop | ||
942-5007-300 | PCB, Servo Position | ||
942-5009-300 | PCB, Power Regulator Low | ||
942-6112-001 | N2 Purge Valve Assy D2016-S33 10W, 24VDC | ||
942-6185-001 | Cable, Chassis to Digital | ||
942-6215-001 | PCB | ||
942-6326-001 | Solenoid, Elec. Nupro. Angar scientific 4093M224120N0 | ||
942-6432-001 | PCB, Memory | ||
942-6474-001 | 400KHZ Matching | ||
942-6503-001 | Cable, power | ||
942-6517-001 | Filter, Strain Gauge | ||
942-6518-001 | Filter | ||
942-6594-001 A | PCB | ||
942-6651-001 | Eprom etc. Set (6 EPROMS + 2 other devices) | ||
99-00303 | Pulley, assembly (with bearing) 303 SVG | ||
99-04089 | Thermocouple probe | ||
99-06635-06 | Air Ring assembly, CTD, 150mm | ||
99-14089-02 | Assembly, Micro step DR | ||
99-15742-02 | Heater element | ||
99-16594-02 | Element, Heater VP | ||
99-16883-02 | Assembly, Block HPO MA | ||
99-580103-30-001 | PCB, CPU, 86/88, HCIU STD W/O EP, 80103D 80103D2-30 | ||
99-80039-07 | Interface, Indexer | ||
99-80068 | PCB, Speed control | ||
99-80137 | PCB, Handler INTER | ||
99-80157-01 | ATS Controller (Transport Arm) | ||
99/80000/01 | Assembly, Single .25mA Sensor PCB | ||
9980115-01 | Assembly, SPDL CNTL 2T | ||
HPO 1 | Thermocouple | ||
MV30-1657-60 | Liner, Furnace Mullite | ||
OL-327 | Lamp, 28V, 40mA, G1736, OL327 | ||
PT-33 | Gasket | ||
S100701-01 | Belt, timing 6R3-174037 BEU VTR THERMC | ||
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SVG THERMCO (AVIZA) | |||
101560-01 | Centering Ring, ISO 80 | ||
104090-02 | Spacers .090 thick | ||
600768-01 | Switch, Deadman | ||
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