|
Spares from: E.T.A., EAO, EAO Olten, Eaton, Eaton Semiconductor Equipment, |
| E.T.A. | |||
 |
96152D01 | Electrode, Thermocouple | 96152D01. |
| EAO | |||
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31-122-025 | Switch, Rectangular Momentary | 31122025. |
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51-165.0 | Indicator, Momentary Rectangle Pushbutton Actuator without Contcat Block.Lamp, Max. 60V, 1.2W | 511650. |
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51.971.022 | Switch Contact Block | 51971022. |
| EAO OLTEN | |||
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11-433-836 | Switch, Overload | 11433836. |
| EATON | |||
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0100-00219 | Tee Male 1/4" Hose | 010000219. |
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0100-00431 | Link, Carriage chain KASP4K | 010000431. |
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0100-00450 | Fitting, 1/8" Elbow NYL KAS | 010000450. |
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0100-00453 | Fitting, Cliplock Male 1/4" | 010000453. |
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0101-00126 | Cylinder, air, KASP III 0001, 150psi max. | 010100126. |
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0101-00128 | Cylinder, air Scrub KASP4K | 010100128. |
| 0101-00129 | Cylinder, Scrub Brush KASP4 | 010100129. |
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0101-00186 | Valve, Cliplock FEM 1/4" | 010100186. |
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0101-00192 | Solenoid, 2way 0066 KASP I | 010100192. |
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0101-00199 | Valve, Cliplock Female 3/8" | 010100199. |
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0101-00202-04 | Valve, Flow control, Resist, Suck Back | 01010020204. |
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0101-00249 | Piston, + DEV KASP4K | 010100249. |
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0101-00280-03 | Gauge, Pressure, 0-15psi, 0006 15G | 01010028003. |
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031562 | Lamp, Igniter, Ignitor, type GTL3 | 031562. |
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0380-00181 | Coupling, + VE DEV | 038000181. |
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0491-00040 | Solenoid, Unload latch, KASP | 049100040 |
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0519-00041 | Screw, KASPIII Scrubber BRU, countersunk, socket head | 051900041. |
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0590-00023 | Ring, KASP 4K Spindle RET 0 | 059000023. |
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0590-0014 | Tru-Arc KASP | 05900014. |
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0897-0034-0001 | 3pc Arc Chamber, Ion Implanter Spares | 089700340001. |
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10-32X1/4 | Screw, 10-32x1/4 | 1032X14. |
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1089350 | GSD HE RF Resonator (Refurbished by Axcelis) | 1089350. |
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1102030 | Gas Feed Through Source | 1102030. |
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1103250 | Shaft Drive | 1103250. |
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1103251 | Shaft Drive | 1103251. |
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1104870 | Power Supply, 5V 100A | 1104870. |
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1112060 | Clutch Elevator | 1112060. |
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1134780 | Switch, flow, Assy Part# 60134 Serial# 1150180 From Proteus | 1134780. |
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1136070 | Feedthrough, High Current M954640 | 1136070. |
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1138440 | Accelerometer Assy | 1138440. |
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1138640 | Suppression Plate | 1138640. |
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1139500 | Lever Arm Assay 125M | 1139500. |
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114473 | PCB, Extender card | 114473. |
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1150190 | Flow Indicator Magne. / Proteus Industries Inc 74645 | 1150190. |
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1150761 | Rep. Kit FTI remplace | 1150761. |
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1152940 | Lever Assy Wafer | 1152940. |
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1201310 | Thermocouple | 1201310. |
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1203800 | Modified screw | 1203800. |
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1204520 | Motor, Shaft mod.12V 4PH .65A 1.8DEG / Eastern Air Device Linear Actuator LA23GCKC-3 | 1204520. |
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| 1401000 | PCB, Power Control Board - Vaporizer Component Side | 1401000. |
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1403750 | PCB Assy Electrode Suppression PA 10C | 1403750 |
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1404590 | HEX serial insulator | 1404590. |
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1407620 | Data entry interface board | 1407620. |
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1430-00113 | Belt, toothed, 0.08"pitch, 14" long, 1/4" wide. IC0 Tooth KASP4K | 143000113 |
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1430-00140 | Sprocket, Bead 0061 KASP4K | 143000140. |
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| 1430-00162 | Pulley, Scrubb Brush 103 | 143000162. |
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1460-00111 | Spring, Unload latch | 146000111. |
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1500-00083 | Belt, toothed, 0.08"pitch, 11.5" long, 1/4" wide. MTR KASP4K | 150000083. |
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1500182 | PCB, I/Q port MA | 1500182. |
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1500290 | Vaporizer Temperature PCB | 1500290. |
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1500570 | PCB, Assembly | 1500570. |
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1500980 | PCB, assy, flat sensor | 1500980. |
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1500990 | Vaporizer Control | 1500990. |
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1501090 | PCB, Beam lock | 1501090. |
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1501160 | PCB, Memory Board | 1501160. |
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1501521 | PCB, CPU Card 990/100 for TM990 system | 1501521. |
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1501820 REV A | PCB, Datalock Slave Board, Rev A | 1501820REVA. |
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1503000 | PCB, TM990 I/O Board TM 990 | 1503000 |
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1503060 | PCB, Remote Controller | 1503060. |
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1503230 | PCB, Analog, for TM990 system | 1503230. |
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1503750 | PCB Assy Electrode Suppression PA 10C | 1503750. |
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1503950 | PCB, assy backpln | 1503950. |
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1504130 | Interconnect System | 1504130. |
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1504350 | PCB, Assembly RMT Cont BF | 1504350. |
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1504580 | PCB, Assembly Power, Rev A | 1504580. |
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1504820 | PCB, Assembly Input Trans | 1504820. |
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1504931 | PCB, CPU Matrox | 1504931. |
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1505050 | PCB, assy datalk interference | 1505050. |
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1505110 | PCB, Assy CPU VAC (TM990 101MA) | 1505110. |
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1505820 | PCB, Dose Cont CPU | 1505820. |
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1507080 | Datalock I/O board | 1507080. |
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1507240 | PCB, transient assy | 1507240. |
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1507400 | PCB, Opto isolator Board | 1507400. |
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1507560 | PCB, Assy Remote Control Interface | 1507560. |
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1507630 | PCB, assy data entry | 1507630. |
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1507720 | PCB, Assy Resn cont 5 | 1507720. |
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1507722 | PCB, Assy Reson. Cont. | 1507722. |
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1507730 | PCB, Assy Com. Oscill. | 1507730. |
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1507742 | PCB | 1507742. |
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1507743 | PCB, Assy RMT A/D-IO | 1507743. |
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1516820 | PCB | 1516820. |
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1516900 | PCB, TM990 CPU 101MB, Cermaic 9900, NV ram. | 1516900 |
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1516940 | PCB, Lead Screw Interface Board | 1516940. |
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| 1555-00007 | Nozzle, Fluid 00007 | 155500007. |
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1555-00008 | Nozzle, Air 00008 | 155500008. |
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1555-00025 | Ring, Knurl KASP III 00009, 3/4" thread, 0.635 ID hole. | 155500025. |
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1612120 | Cable, RF 5.2MHz | 1612120. |
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1621411 | Cable, Filament | 1621411. |
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1700240 | Feedthrough, Filament | 1700240. |
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17010200 | STDF CLP CPLR Ceramics | 17010200. |
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17010210 | STDF CPLR Ceramic | 17010210. |
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17011780 | Insulator | 17011780. |
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17012100 | Insulating Washer | 17012100. |
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17018100 | Stop rear | 17018100. |
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17018110 | Out Board Wafer | 17018110. |
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17018120 | Stud Rear Stop | 17018120. |
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17020550 | Plate, Aperture R | 17020550. |
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17020551 | Plate, Aperture | 17020551. |
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17041480 | Tube, Extension | 17041480. |
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17041490 | Beam dump | 17041490. |
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17041500 | Aperture Resolving | 17041500. |
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17041520 | Aperture Graphite | 17041520. |
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| 17041800 | Drip Pan Price Cool Pump 80 Kit | 17041800. |
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1704990 | Side Plate, Ion Implanter Spares | 1704990. |
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1705001 | Plate, Arc Chamber Re | 1705001. |
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17053090 | Tend Stop High Cur. | 17053090. |
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17059990 | Clevis | 17059990. |
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| 1717482 | Face Plate, Ion Implanter Spares | 1717482. |
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1733710 | Bearing, Pad | 1733710. |
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1755630 | Graphite Ground Disc | 1755630. |
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1760780 | Rod, MTG Pole Shoe | 1760780. |
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1761840 | Aperture Graphite MA | 1761840. |
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1761850 | Aperture Graphite BE | 1761850. |
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1762520 | Shield Beam | 1762520. |
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1766040 | Guide, R | 1766040. |
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1766080 | Magnetic Shoe 1.25 Gap MA | 1766080. |
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1766570 | STDF BM PLT | 1766570. |
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1766640 | Clevis | 1766640. |
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1767370 | Bearing, Shaft | 1767370. |
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1770530 | Slit Plate Arc Chamber | 1770530. |
|
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1770540 | Plated end Shield | 1770540. |
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1770550 | End Plate Arc Chamber | 1770550. |
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1771080 | Electrode, Ground | 1771080. |
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1772010 | Ground Electrode | 1772010. |
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1774070 | RLR Slide | 1774070. |
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17766580 | Plate, beam | 17766580. |
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1781650 | Clamp, Locator Shaft | 1781650. |
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1784780 | Feedtrough connector | 1784780. |
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1784790 | Strap Exp | 1784790. |
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1784820 | Insulator Block | 1784820. |
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1784880A | HSG Electron SHWR | 1784880A. |
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1785810 | Screen Wafer Clamp | 1785810. |
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1787740 | Trapelectron Shower | 1787740. |
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1788020 | Feedtrough Flange | 1788020. |
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1788030 | Feedthrough | 1788030. |
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1789810 | End Plate, Ion Implanter Spares | 1789810. |
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1792520 | Roller, Faraday Showe | 1792520. |
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1792551 | Faraday Cup Graphite | 1792551. |
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1796490 | Mounting Insulator | 1796490. |
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1796790 | DR Nut NV-1 | 1796790. |
|
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1796791 | DR Nut NV-1 | 1796791. |
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1796800 | Electrode, Truncated | 1796800. |
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1796840 | Extration Electrode | 1796840. |
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1798510 | Block, Suppression | 1798510. |
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1820-00238 | IC, P1262 (N8T97D), PROM, programmed code: 1820-00238 | 182000238. |
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| 1820-00273 | IC, DAC D8CZ | 182000273. |
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1900040 | Switch, Cylinder | 1900040. |
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1900070 | PCB, A to D (analog to digital) | 1900070. |
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1900870 | Coupling, AE Spietr DSK-2.50x3.50-01 | 1900870. |
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1902-290C | RF Power Supply, 1KW, 5.2MHz. | 1902290C. |
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1902242 | RF Cont Band M Plug | 1902242. |
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1902251 | RF Band F SKT | 1902251. |
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1903040 | PCB, TM990/101MB CPU board | 1903040. |
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1905160 | Sliding Seal Set | 1905160. |
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1990-00019 | Sensor, TIL78 IR receiver | 199000019. |
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1990-00020 | Sensor, MRD 360 | 199000020 |
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1990-00023 | Sensor, 0PB804 INDEX 0026 | 199000023. |
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1990-00027 | Sensor, brake SEARCH T1L81 | 199000027. |
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2000088 | Feedthrough 80KeV | 2000088. |
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2000216 | PCB, driver | 2000216. |
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2000520 | Variac Brush KSI From Superior Electric | 2000520. |
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2001-0115 | Rod, End Oven 0115 | 20010115. |
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2100041 | Power Products PM861 | 2100041. |
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2100071 | Converter, DC/DC | 2100071. |
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2140-00066 | Lamp, Sensor SCE0014 | 214000066. |
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2140-00075 | Lamp, Overload Sensor | 214000075. |
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2500151 | Ball Slide for Wafer | 2500151. |
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3101-00101 | Switch, Vacuum, 00045 KASP I Range 30" to 0 hg VAC/-100 to 0 kpa, Type J40, Model 218 | 310100101. |
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3101-00134 | Switch, Momentary, AR0092 KASP | 310100134. |
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3101-00135 | Switch, Auto/Manual, with lamp holder, 0093 KASP I | 310100135. |
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3101-00144 | Switch, IDX start/stop, with lamp holder, KASP III | 310100144. |
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3101-00146 | Switch, 1c/o, Latch, with lamp holder, KASP4K | 310100146. |
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3101-00200 | Switch, Keyboard, Enter, KASP | 310100200. |
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3101-00216 | Switch, on/off, 6A, push/push, red button, with lamp holder, KASP4K | 310100216. |
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3130-00085 | Cap, Switch, White KASP4K | 313000085. |
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3130-00086 | Cap Switch, Red KASP4K | 313000086. |
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3130-00105 | Button, for push-button switch, white (IDX Reset KASP III) | 313000105. |
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3150-00016 | Gasket, KASP4K Vac Bowl | 315000016. |
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316-563 | Switch, Index toggle, KASP I | 316563. |
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3200019 | Solenoid, 3W Humphrey 31E1 120 | 3200019. |
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3500255 | Seal, oil 21/8" Bore | 3500255. |
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3500256 | Seal, Oil 1.850 Bore | 3500256. |
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3500257 | Seal, ARI0400 -321VC | 3500257. |
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3500487 | Special Seal | 3500487. |
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36F6689 | 36F6689. | |
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400-31973-01 | Ring + DEV Catchcup KASP4K | 4003197301. |
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400-31974-01 | Ring + DEV Teflon KASP4K | 4003197401. |
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400-31975-01 | Screw, + DEV Catchcup KASP4 | 4003197501. |
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400-31976-02 | Catchcup DEV + KASP4K | 4003197602. |
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400-32411-04K | Machining Elev. Spindle | 4003241104K. |
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400-32718-01B | Conveyor motor plate | 4003271801B. |
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| 400-33344-01 | Insert, Disp Nozz Scrubb KA | 4003334401. |
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400-33999-01 | Pulley, convey (501-30375) | 4003399901. |
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400-34879-01 | Controller, Programmable, Series 945, PID | 4003487901 |
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400-34962-01 | Shaft, Spindle 13524 | 4003496201. |
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400-35012-01 | Bumper strip CARR 2679 KASP4 | 4003501201. |
|
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400-35470-01 | Seal, Shaft, KASP4K Spindle, 1/4" x 5/8" x 0.2". | 4003547001. |
|
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4001-6888 | Seal, Nylon, Kaper III, 15.25mm OD, 7.75mm ID, 1.15mm thick | 40016888. |
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| 401-06211 | Hook, Scrub Brush KASP4K | 40106211. |
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401-06477 | Index lead Screw KASP4K | 40106477. |
|
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401-06821 | Housing, spindle KASP4K | 40106821. |
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401-06869 | Nut, LD SCRE INDX KASP4K | 40106869. |
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401-06890 | Adaptor shaft KASPIII | 40106890. |
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401-06919 | Spring, centre device III | 40106919. |
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403-06967 | Coupler, photo KASP4K | 40306967. |
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| 403-30154 | Diaphragm, Scrub KASP4K | 40330154. |
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410-06378 | Catchcup, 4" KASPIII | 41006378. |
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4100004 | Pulley, Timing | 4100004. |
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4100082 | Belt, Timing | 4100082. |
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4200126 | Bushing, Ball Res MT / Thomson RSL 500 | 4200126. |
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4300498 | Pin, DWL 0626X.50L | 4300498. |
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430497 | Pin, SPL CP645 | 430497. |
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4400001 | Screw, 10-32x3/8 SHCS SS | 4400001. |
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4400053 | Screw, 10-32x1/2 FL/S | 4400053. |
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4400120 | Screw, 2-56x1/4 S/H/C | 4400120. |
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4600129 | Washer, Bellul | 4600129. |
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4618809EO1 | Manifold + VE DEV KASP4K | 4618809EO1. |
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5000110 | Base, Relay | 5000110. |
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5000114 | Contact | 5000114. |
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5000593 | Motor Starter 3HP | 5000593. |
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5000594 | Motor Starter | 5000594. |
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5000933 | Relay, Time delay, Diversified Electronics TDD-0150 | 5000933. |
|
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5001-7485 | Sensor block 7485 | 50017485. |
|
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5001-7751 | Element, Upper ICO 7751 | 50017751. |
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501-07029 | Latch, unload assembly KASPIII | 50107029. |
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501-07206 | Head scrub, Disp+Piping KAS | 50107206. |
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501-31318 | Box + DEV Valve ASS KASP4K | 50131318. |
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501-34372-01 | Nozzle, Resist 1709 | 5013437201. |
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501-50010 | PCB, Power supply, 50010 KAS | 50150010. |
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501-50021-01 | PCB, Memory 50021 KASP4K | 5015002101. |
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501-50033 | PCB, CON/ICO Sensor 50033 | 50150033. |
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501-50051 | PCB, CCU 50000 KASP4K | 50150051. |
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506-31781-01 | Cable, Spin MTR Harness KA | 5063178101. |
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5100304 | Plug, 3way, 15A 125V 4720-C NY Hubbell | 5100304. |
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5100448 | Quick Connect F 30 | 5100448. |
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527-32569-01 | PCB, Resist pump 7124 KASP4 | 5273256901. |
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60-300 | Power Supply for Shunt Motor Fenner SD1-1525-101-1 | 60300. |
|
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6000327 | Accelerometer /Setra 141A-2G N537243 | 6000327. |
|
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6300082 | Transistor, IRF 453, N channel Mosfet, 450V 11A | 6300082. |
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6500114 | Mercury wetted contact relay from Midland Ross 162-151 AOO | 6500114. |
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6500218 | Switch, pressure, AT4 | 6500218. |
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6500258 | Switch, optical | 6500258. |
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6500381 | Switch, OPT CLI-8905 | 6500381. |
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6500406 | Switch | 6500406. |
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67F8523 | 67F8523. | |
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| 78SM-3 | Clip, ICO Tach/Encode MTG KA | 78SM3. |
|
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8120-00019 | Cable, Retractile, retracted length: 2ft, extended: 10ft, 4 way, IDX CL KASP4K | 812000019. |
|
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81805-001 | Gear, Nylon, Carr Motor KASP | 81805001. |
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9100-00039 | Transformer, 115/230v input, 34v, 700mA output | 910000039. |
|
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9100-00040 | Transformer, Filament, CPU 6VAC KASP | 910000040. |
|
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9100-00046 | Transformer, 115/230v input, 12v output KAS | 910000046. |
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E1404650 | PCB | E1404650. |
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E1407080 | PCB, interface board | E1407080. |
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E1407590 | PCB, Power Board | E1407590. |
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E1507070 | PCB, Sensor Board | E1507070. |
|
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E1621415 | Cable, with Lugs | E1621415. |
|
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OPB875T55 | Opto, OPB875T55 Interrupt KA | OPB875T55. |
| EATON SEMICONDUCTOR EQUIPMENT | |||
|
|
2200024C | Series 2000 HV Unit (218363) | 2200024C |
| EATON | |||
|
|
YJ03880 | PCB, art# 1403880 | YJ03880. |
