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Spares from: ASM, Asm Qualiflow, |
| ASM | |||
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02-105180D01 | Thermocouple PECVD 3 Dual | 02105180D01. |
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03-1439 | Gasket, Silicone N2 | 031439 |
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031749 | Gasket, Graphite | 031749. |
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05000 50F5329 | Roller and Shaft Assy | 0500050F5329. |
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100112 | Valve, Manual FTM2F | 100112. |
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11-0792 | O-Ring, 72.64x3.53 Silicone | 110792. |
| 11-0853 | Filter, Gas Line | 110853. |
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120117 | Valve, F RHP Quarter T | 120117. |
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120717 | Valve, F RHP Quarter T | 120717. |
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122 403 150.11 | Quartz Finger | 12240315011. |
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122 425 240.11 | Disc | 12242524011. |
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122 425 260.11 | Yoke | 12242526011. |
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122 425 280.11 | Pin, (Pivot) | 12242528011. |
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122460030 | Maintenance Panel. Manual Control Transport | 122460030. |
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123 063 050 | Power Pack Assy | 123063050. |
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123061240 | Assembly, Thermocouple 13 | 123061240. |
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2 014 564-01 | Transformer, 220/240V i/p, o/p 6V x2, 10V x2. | 201456401. |
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200 654 501 | Sensor, Finger Detector | 200654501. |
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200059-01 | Manual Control Tube Loader Panel Assembly | 20005901. |
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2017547-07 | Thermocouple, PECVD 1 & 2 | 201754707. |
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204 1561.02 | Twisted cable ratio | 204156102. |
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210112 | Valve, Qualiflow Pneumatic | 210112. |
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210117 | Valve, Pneumatic, | 210117. |
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210217 | Valve, pneumatic, F AN | 210217. |
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230 119 DD 000 | Valve, pneumatic, F HF | 230119DD000. |
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27301001000 | Operator Panel | 27301001000. |
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273060070 | Keyboard (+switch) | 273060070. |
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300111 | Valve, Pneumatic, F MO | 300111. |
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300112 | Valve, PECVD Pneumatic NC | 300112. |
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300117 | Valve, pneumatic, F RH | 300117. |
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300167 | Valve, Pneumatic, PSV (Qualiflow) | 300167. |
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300217 | Valve, pneumatic, | 300217. |
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300517 | Valve, Pneumatic, F RH | 300517. |
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300717 | Valve, Qualiflow Pneumatic F RH | 300717. |
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3080034 | Eurotherm 810 | 3080034. |
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3082783 | Mass Flow Controller AFC-260 500sccm N2/O2 | 3082783. |
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31439 | Gasket, Silicone N2 | 31439. |
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31749 | Gasket, Graphite | 31749 |
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32125036000 | Cable, assy keyboard | 32125036000. |
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32125066000 | Cable, assy satc/cas | 32125066000. |
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321492100.00 | Power Supply Cable | 32149210000. |
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340107460.1 | Rod, Tie boat, PECVD | 3401074601. |
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340107480.1 | Slide, Wheeled Boat, PECVD | 3401074801. |
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402-714 | Valve, PECVD Shut-Off MSV | 402714. |
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4080136 | Square Seal Silicone | 4080136. |
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4080137 | Square Seal Viton | 4080137. |
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445517 | Valve, Variable | 445517. |
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4764224 | Cable, ASM Y axis sensor | 4764224. |
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5010011 | Power Pack Card | 5010011. |
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5020044 | PCB, Control Card | 5020044. |
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5150004 | PCB, Safety Card | 5150004. |
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560219 | O-Ring, 170x15, (LPCVD tube bank 2) 51414 | 560219. |
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606200 | Position Detector | 606200. |
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630030440 | PCB, Signal Distribution board | 630030440. |
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632 720 220 | PCB, MPU Board SATC | 632720220. |
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632 720 520 | PCB, Host Adaptor | 632720520 |
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632 720 520.00 | PCB, Host Adaptor | 63272052000. |
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632 720 530 | PCB, Communications ICC S | 632720530 |
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632 720 530.00 | PCB, Communications ICC S | 63272053000. |
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632-720100-00 | PCB, Analog Input | 63272010000. |
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632-72011000 | PCB, Video Display Board | 63272011000. |
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63261017000 | PCB, Motor Drive | 63261017000. |
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63261018000 | PCB, Power Motor Drive | 63261018000. |
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632610190 | PCB, Finger Drive | 632610190. |
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63261216000 | PCB, Z + PHI Interface | 63261216000. |
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63263001000 | Encoder / Operator | 63263001000. |
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63263012000 | Keyboard Oper. TLC PC | 63263012000. |
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632630170 | PCB, Interface Board Connector | 632630170. |
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6326301801 | PCB, Backplane with Euro connectors | 6326301801. |
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63263021000 | PCB, Exerciser, TMC | 63263021000. |
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63263024000 | Keyboard Maint. TM PC | 63263024000. |
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63263025000 | PCB, S.C.L. Connector | 63263025000. |
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63263027000 | Sensor, PCB0 | 63263027000. |
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632720052 | PCB, PECVD Analog Micon IT | 632720052. |
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632720081 | PCB, PECVD Memory Micon II | 632720081. |
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63272009100 | PCB, Analog Output | 63272009100. |
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632720140.00 | Digital in/out board | 63272014000. |
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632720300 | PCB, RAM/ROM Assy SATC | 632720300. |
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632720350 | PCB, CPU Board TMC | 632720350. |
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632720360 | PCB, CPU Board 6809 TLC | 632720360. |
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632720490 | PCB, MPU ICC | 632720490. |
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632720500 | PCB, Memory ICC | 632720500. |
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633-430-04000 | PCB, PECVD RF Control | 63343004000. |
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6901125 | Valve, PECVD PNEU ENOM2FF | 6901125. |
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800 100 588 | Linear Drive Unit/Van Gelder Company | 800100588. |
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800-810-770 | Gauge, PECVD Pressure 0-2. | 800810770. |
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800-904-618 | Module, Amplifier BN 6429 | 800904618. |
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| 800-905-295 | Fan, PECVD Heat Exch | 800905295. |
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800-905-400 | Power Supply, PECVD MICON, KHSF172-4X | 800905400. |
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800-905-494 | Meter, PECVD, RF, 1mA DC | 800905494. |
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800-905-887 | Triac PECVD BTX94-400 (80 | 800905887. |
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800.400.261 | Rail Runner | 800400261. |
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800.500.294 | Encoder Strip | 800500294. |
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800.500.571 | Belt, Timing | 800500571. |
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800.500.572 | Belt, Timing, Bando T5-455 OL | 800500572. |
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800.500.573 | Belt, Timing, Bando T5-780 OB | 800500573. |
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800.500.895 | Belt, Pirelli T5-185-10 | 800500895. |
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800.900.080 | Lamp Holder green | 800900080. |
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800.904.262 | PCB, Preset (see photo) | 800904262. |
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800.904.522 | Reflector 40x180 | 800904522. |
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800.904.524 | Fork Shape Sensor | 800904524. |
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800.904.619 | Overvoltage Prot BN | 800904619. |
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800.904.620 | PCB, Interface BN 2 | 800904620. |
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800.904.622 | PCB, Comparator BN | 800904622. |
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800.904.623 | PCB, Power VA 57 / | 800904623. |
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800.904.624 | PCB, Power VA 57 / | 800904624. |
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800.904.626 | PCB, Preset S57 | 800904626. |
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800.904.628 | PCB, Battery Backup | 800904628. |
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800.904.906 | Transformer, P 282 | 800904906. |
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800.904.952 | Key Switch | 800904952. |
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800.905.939 | Sensor, Oil Level | 800905939. |
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| 800500851 | Paper Roll ASM 4PP | 800500851. |
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800500873 | O-Ring, 189.87x5.33, Viton, (PECVD door seal) | 800500873. |
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800500944 | O-Ring, 69.44x3.53, black Silicone (PECVD) | 800500944 |
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800810800 | Valve, Bellow, NW40, PECVD Vacuum | 800810800 |
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800905047 | Valve, PECVD Clippard EV3M | 800905047. |
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800905421 | Valve, throttle 1.27 inch, 32mm | 800905421 |
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800905503 | Elbow, PECVD UHF Connector (83-1AP) | 800905503. |
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800905949 | Switch, Pres ATM PECV | 800905949. |
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808 007 203 | Floppy Station 3 | 808007203. |
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808.008.072 | Switch, Main | 808008072. |
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808.016.006 | Opto-sensor Single | 808016006. |
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808.053.003 | Motor+ Gear 60 RPM Dunkermotoren # 88856 01127+88412 01470 | 808053003. |
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808.053.004 | Motor, Encode gear | 808053004. |
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808.053.007 | Dunkermotoren Motor Gear + Tacho | 808053007. |
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808078009 | Pin, Cotter SS Boat PEC VD | 808078009. |
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900638/013 | O-Ring, 170.82x6.99 Silicone VLTO Tube, brown | 900638013. |
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9030030 | Controller, PS 84 0034.S from SEMY engineering POT SAPY | 9030030. |
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904152-002 | Seal, Square Section 164x4 Silicone (VLTO Tube) | 904152002. |
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9406191001 | Switch, Pressure | 9406191001. |
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994-905 236 | PCB, Video | 994905236. |
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994-905 852 | PCB, Video Processor Board | 994905852. |
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| 994.904.853 | Monitor, 15" model DF4000-340A | 994904853. |
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994.904.855 | Power Supply | 994904855. |
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994.904.856 | Power Supply, Xentek Inc Model 2X45-3651 | 994904856. |
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AFC-260 100SCCM WF6 | Mass Flow Controller 100sccm WF6 | AFC260100SCCMWF6. |
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AFC-260 1SLM N2 | Mass Flow Controller AFC-260 1SLM N2 | AFC2601SLMN2. |
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AFC-260 1SLM N2/O2 | Mass Flow Controller AFC-260 N2/O2 1SLM | AFC2601SLMN2O2. |
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AFC-260 1SLM O2 | Mass Flow Controller AFC-260 1SLM O2 | AFC2601SLMO2. |
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AFC-260 200SCCM N2 | Mass Flow Controller 200sccm N2 | AFC260200SCCMN2. |
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AFC-260 300CC HC1 | Mass Flow controller AFC-260 300CC HC1 | AFC260300CCHC1. |
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AFC-260 300SCCM NF3 | Mass Flow Controller 300sccm NF3 | AFC260300SCCMNF3. |
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AFC-260 500SCCM HCL | Mass Flow Controller 500sccm HCL | AFC260500SCCMHCL. |
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AFC-260 500SCCM N2 | Mass Flow Controller AFC-260 VCR 0.2 - 500sccm N2 | AFC260500SCCMN2. |
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AFC-260 500SCCM NH3 | Mass Flow Controller 500sccm NH3 | AFC260500SCCMNH3. |
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AFC-260 500SCCM SiH4 | Mass Flow Controller AFC-260 VCR 0.2 - 500sccm SiH4 | AFC260500SCCMSIH4. |
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AFC-260 5SLM Ar | Mass Flow Controller model AFC-260 5SLM Ar | AFC2605SLMAR. |
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AFC-260 5SLM N2 | Mass Flow Controller 5SLM N2 | AFC2605SLMN2. |
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AFC-261 10L H2 | Mass Flow Controller AFC-261 10L H2 | AFC26110LH2. |
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AFC-261 20 SLM Ar | Mass Flow Controller AFC-261 20SLM Ar | AFC26120SLMAR. |
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AFC-261 20L He | Mass Flow Controller AFC-261 20L He | AFC26120LHE. |
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BTW45-800R | Thyristor (SCR) BTW45-800R | BTW45800R. |
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N0/SP/V/X | Mass Flow Controller 500SCCM HC1 | N0SPVX. |
| ASM QUALIFLOW | |||
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13901035 | FQ M2 HF 3/8 VCR 74,5mm | 13901035. |
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300617 | Valve, pneumatic, FNC M3EL RHP | 300617. |
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555911 | CHK 1 MODU.C | 555911. |
| ASM | |||
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VB 78 C8 | Valve, Qualiflow Control 1/4 | VB78C8. |
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VB 85 D | Valve, pneumatic, PSV (Qualiflow) | VB85D. |
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VB75D | Valve, Isolation CL2 | VB75D. |
