Evap Spares

We hold in stock thousands of spare parts for machinery used in
the semiconductor, optical and opthalmic manufacturing industries.
Spares from: 
ASM,  Asm Qualiflow, 

   
ASM
02-105180D01 Thermocouple PECVD 3 Dual Photo of 02105180D01
03-1439 Gasket, Silicone N2 Photo of 031439
031749 Gasket, Graphite Photo of 031749
05000 50F5329 Roller and Shaft Assy Photo of 0500050F5329
100112 Valve, Manual FTM2F Photo of 100112
11-0792 O-Ring, 72.64x3.53 Silicone Photo of 110792
11-0853 Filter, Gas Line Ring for information.
120117 Valve, F RHP Quarter T Photo of 120117
120717 Valve, F RHP Quarter T Photo of 120717
122 403 150.11 Quartz Finger Photo of 12240315011
122 425 240.11 Disc Photo of 12242524011
122 425 260.11 Yoke Photo of 12242526011
122 425 280.11 Pin, (Pivot) Photo of 12242528011
122460030 Maintenance Panel. Manual Control Transport Photo of 122460030
123 063 050 Power Pack Assy Photo of 123063050
123061240 Assembly, Thermocouple 13 Photo of 123061240
2 014 564-01 Transformer, 220/240V i/p, o/p 6V x2, 10V x2. Photo of 201456401
200 654 501 Sensor, Finger Detector Photo of 200654501
200059-01 Manual Control Tube Loader Panel Assembly Photo of 20005901
2017547-07 Thermocouple, PECVD 1 & 2 Photo of 201754707
204 1561.02 Twisted cable ratio Photo of 204156102
210112 Valve, Qualiflow Pneumatic Photo of 210112
210117 Valve, Pneumatic, Photo of 210117
210217 Valve, pneumatic, F AN Photo of 210217
230 119 DD 000 Valve, pneumatic, F HF Photo of 230119DD000
27301001000 Operator Panel Photo of 27301001000
273060070 Keyboard (+switch) Photo of 273060070
300111 Valve, Pneumatic, F MO Photo of 300111
300112 Valve, PECVD Pneumatic NC Photo of 300112
300117 Valve, pneumatic, F RH Photo of 300117
300167 Valve, Pneumatic, PSV (Qualiflow) Photo of 300167
300217 Valve, pneumatic, Photo of 300217
300517 Valve, Pneumatic, F RH Photo of 300517
300717 Valve, Qualiflow Pneumatic F RH Photo of 300717
3080034 Eurotherm 810 Photo of 3080034
3082783 Mass Flow Controller AFC-260 500sccm N2/O2 Photo of 3082783
31439 Gasket, Silicone N2 Photo of 31439
31749 Gasket, Graphite Photo of 31749
32125036000 Cable, assy keyboard Photo of 32125036000
32125066000 Cable, assy satc/cas Photo of 32125066000
321492100.00 Power Supply Cable Photo of 32149210000
340107460.1 Rod, Tie boat, PECVD Photo of 3401074601
340107480.1 Slide, Wheeled Boat, PECVD Photo of 3401074801
402-714 Valve, PECVD Shut-Off MSV Photo of 402714
4080136 Square Seal Silicone Photo of 4080136
4080137 Square Seal Viton Photo of 4080137
445517 Valve, Variable Photo of 445517
4764224 Cable, ASM Y axis sensor Photo of 4764224
5010011 Power Pack Card Photo of 5010011
5020044 PCB, Control Card Photo of 5020044
5150004 PCB, Safety Card Photo of 5150004
560219 O-Ring, 170x15, (LPCVD tube bank 2) 51414 Photo of 560219
606200 Position Detector Photo of 606200
630030440 PCB, Signal Distribution board Photo of 630030440
632 720 220 PCB, MPU Board SATC Photo of 632720220
632 720 520 PCB, Host Adaptor Photo of 632720520
632 720 520.00 PCB, Host Adaptor Photo of 63272052000
632 720 530 PCB, Communications ICC S Photo of 632720530
632 720 530.00 PCB, Communications ICC S Photo of 63272053000
632-720100-00 PCB, Analog Input Photo of 63272010000
632-72011000 PCB, Video Display Board Photo of 63272011000
63261017000 PCB, Motor Drive Photo of 63261017000
63261018000 PCB, Power Motor Drive Photo of 63261018000
632610190 PCB, Finger Drive Photo of 632610190
63261216000 PCB, Z + PHI Interface Photo of 63261216000
63263001000 Encoder / Operator Photo of 63263001000
63263012000 Keyboard Oper. TLC PC Photo of 63263012000
632630170 PCB, Interface Board Connector Photo of 632630170
6326301801 PCB, Backplane with Euro connectors Photo of 6326301801
63263021000 PCB, Exerciser, TMC Photo of 63263021000
63263024000 Keyboard Maint. TM PC Photo of 63263024000
63263025000 PCB, S.C.L. Connector Photo of 63263025000
63263027000 Sensor, PCB0 Photo of 63263027000
632720052 PCB, PECVD Analog Micon IT Photo of 632720052
632720081 PCB, PECVD Memory Micon II Photo of 632720081
63272009100 PCB, Analog Output Photo of 63272009100
632720140.00 Digital in/out board Photo of 63272014000
632720300 PCB, RAM/ROM Assy SATC Photo of 632720300
632720350 PCB, CPU Board TMC Photo of 632720350
632720360 PCB, CPU Board 6809 TLC Photo of 632720360
632720490 PCB, MPU ICC Photo of 632720490
632720500 PCB, Memory ICC Photo of 632720500
633-430-04000 PCB, PECVD RF Control Photo of 63343004000
6901125 Valve, PECVD PNEU ENOM2FF Photo of 6901125
800 100 588 Linear Drive Unit/Van Gelder Company Photo of 800100588
800-810-770 Gauge, PECVD Pressure 0-2. Photo of 800810770
800-904-618 Module, Amplifier BN 6429 Photo of 800904618
800-905-295 Fan, PECVD Heat Exch Just In: Photo on request.
800-905-400 Power Supply, PECVD MICON, KHSF172-4X Photo of 800905400
800-905-494 Meter, PECVD, RF, 1mA DC Photo of 800905494
800-905-887 Triac PECVD BTX94-400 (80 Photo of 800905887
800.400.261 Rail Runner Photo of 800400261
800.500.294 Encoder Strip Photo of 800500294
800.500.571 Belt, Timing Photo of 800500571
800.500.572 Belt, Timing, Bando T5-455 OL Photo of 800500572
800.500.573 Belt, Timing, Bando T5-780 OB Photo of 800500573
800.500.895 Belt, Pirelli T5-185-10 Photo of 800500895
800.900.080 Lamp Holder green Photo of 800900080
800.904.262 PCB, Preset (see photo) Photo of 800904262
800.904.522 Reflector 40x180 Photo of 800904522
800.904.524 Fork Shape Sensor Photo of 800904524
800.904.619 Overvoltage Prot BN Photo of 800904619
800.904.620 PCB, Interface BN 2 Photo of 800904620
800.904.622 PCB, Comparator BN Photo of 800904622
800.904.623 PCB, Power VA 57 / Photo of 800904623
800.904.624 PCB, Power VA 57 / Photo of 800904624
800.904.626 PCB, Preset S57 Photo of 800904626
800.904.628 PCB, Battery Backup Photo of 800904628
800.904.906 Transformer, P 282 Photo of 800904906
800.904.952 Key Switch Photo of 800904952
800.905.939 Sensor, Oil Level Photo of 800905939
800500851 Paper Roll ASM 4PP Just In: Photo on request.
800500873 O-Ring, 189.87x5.33, Viton, (PECVD door seal) Photo of 800500873
800500944 O-Ring, 69.44x3.53, black Silicone (PECVD) Photo of 800500944
800810800 Valve, Bellow, NW40, PECVD Vacuum Photo of 800810800
800905047 Valve, PECVD Clippard EV3M Photo of 800905047
800905421 Valve, throttle 1.27 inch, 32mm Photo of 800905421
800905503 Elbow, PECVD UHF Connector (83-1AP) Photo of 800905503
800905949 Switch, Pres ATM PECV Photo of 800905949
808 007 203 Floppy Station 3 Photo of 808007203
808.008.072 Switch, Main Photo of 808008072
808.016.006 Opto-sensor Single Photo of 808016006
808.053.003 Motor+ Gear 60 RPM Dunkermotoren # 88856 01127+88412 01470 Photo of 808053003
808.053.004 Motor, Encode gear Photo of 808053004
808.053.007 Dunkermotoren Motor Gear + Tacho Photo of 808053007
808078009 Pin, Cotter SS Boat PEC VD Photo of 808078009
900638/013 O-Ring, 170.82x6.99 Silicone VLTO Tube, brown Photo of 900638013
9030030 Controller, PS 84 0034.S from SEMY engineering POT SAPY Photo of 9030030
904152-002 Seal, Square Section 164x4 Silicone (VLTO Tube) Photo of 904152002
9406191001 Switch, Pressure Photo of 9406191001
994-905 236 PCB, Video Photo of 994905236
994-905 852 PCB, Video Processor Board Photo of 994905852
994.904.853 Monitor, 15" model DF4000-340A Just In: Photo on request.
994.904.855 Power Supply Photo of 994904855
994.904.856 Power Supply, Xentek Inc Model 2X45-3651 Photo of 994904856
AFC-260 100SCCM WF6 Mass Flow Controller 100sccm WF6 Photo of AFC260100SCCMWF6
AFC-260 1SLM N2 Mass Flow Controller AFC-260 1SLM N2 Photo of AFC2601SLMN2
AFC-260 1SLM N2/O2 Mass Flow Controller AFC-260 N2/O2 1SLM Photo of AFC2601SLMN2O2
AFC-260 1SLM O2 Mass Flow Controller AFC-260 1SLM O2 Photo of AFC2601SLMO2
AFC-260 200SCCM N2 Mass Flow Controller 200sccm N2 Photo of AFC260200SCCMN2
AFC-260 300CC HC1 Mass Flow controller AFC-260 300CC HC1 Photo of AFC260300CCHC1
AFC-260 300SCCM NF3 Mass Flow Controller 300sccm NF3 Photo of AFC260300SCCMNF3
AFC-260 500SCCM HCL Mass Flow Controller 500sccm HCL Photo of AFC260500SCCMHCL
AFC-260 500SCCM N2 Mass Flow Controller AFC-260 VCR 0.2 - 500sccm N2 Photo of AFC260500SCCMN2
AFC-260 500SCCM NH3 Mass Flow Controller 500sccm NH3 Photo of AFC260500SCCMNH3
AFC-260 500SCCM SiH4 Mass Flow Controller AFC-260 VCR 0.2 - 500sccm SiH4 Photo of AFC260500SCCMSiH4
AFC-260 5SLM Ar Mass Flow Controller model AFC-260 5SLM Ar Photo of AFC2605SLMAr
AFC-260 5SLM N2 Mass Flow Controller 5SLM N2 Photo of AFC2605SLMN2
AFC-261 10L H2 Mass Flow Controller AFC-261 10L H2 Photo of AFC26110LH2
AFC-261 20 SLM Ar Mass Flow Controller AFC-261 20SLM Ar Photo of AFC26120SLMAr
AFC-261 20L He Mass Flow Controller AFC-261 20L He Photo of AFC26120LHe
BTW45-800R Thyristor (SCR) BTW45-800R Photo of BTW45800R
N0/SP/V/X Mass Flow Controller 500SCCM HC1 Photo of N0SPVX
Back to Top ^
   
ASM QUALIFLOW
13901035 FQ M2 HF 3/8 VCR 74,5mm Photo of 13901035
300617 Valve, pneumatic, FNC M3EL RHP Photo of 300617
555911 CHK 1 MODU.C Photo of 555911
Back to Top ^
   
ASM
VB 78 C8 Valve, Qualiflow Control 1/4 Photo of VB78C8
VB 85 D Valve, pneumatic, PSV (Qualiflow) Photo of VB85D
VB75D Valve, Isolation CL2 Photo of VB75D
Back to Top ^
 


Contact details:

You can contact us at:
Allsmart House,
2 Pipit Rise
Bedford
MK41 7JS
United Kingdom
or
by phone on +44 (0)7824 665466
or fax on +44 (0)1234 271 991

This page last updated at 12.49 on Wednesday, 20 March 2013
Valid HTML 4.01!