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Spares from: Applied (N-Cons), Applied Materials (Amat), |
| APPLIED (N-CONS) | ||
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1210-02418 | Resistor 20ohms 50W |
| APPLIED MATERIALS (AMAT) | ||
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0010-00183 | Motor, Z-axis stepper robot |
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0010-11007 | Plate Position Detector |
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0010-11084 | End controller |
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0010-11128 | Robot Position Detector |
| 0010-11138 | 1ND Defector Robot |
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0010-11173 | Vacuum Tongue |
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0010-90605 | Assembly, MVG clip, 125-150.0 deg. |
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| 0010-90699 | Resistor string, MG 780 1MEG 2% |
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0015-00054 | Pad, Head conductive 8330 |
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0015-09056 | Bellows, hoop solid |
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0015-09179 | Washer, concave |
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0015-11086 | Shuttle Encoder |
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| 0015-20035 | Screw, Insulator (Part of Kit 0240-23703) |
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| 0020-01074 | Cup Vac Pickup 8100 |
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0020-01350 | Insulator, Bias |
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| 0020-03466 | Spring, hub gripper 8336 |
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| 0020-03553 | Screw, Etch chamber cover |
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| 0020-03652 | Film, Protective |
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0020-06048 | Bushing, Throttle valve |
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| 0020-06815 | Hex insulator (8310) |
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0020-06978 | Spring, pedestal |
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| 0020-09376 | O-Ring 329.79x3.53 Viton, Bottom cover |
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| 0020-10815 | Shield 150mm EC |
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0020-10888 | Screw Half dog point, BWCVD |
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0020-10890 | Screw, panhead, 6-32 X 1/2" Aluminium |
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0020-10941 | Isolator Teflon ring, 200mm inner diameter, AMT 5000 |
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0020-11434 | Up and Down Lift Flange |
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0020-11755 | Pin Insert |
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0020-11930 | Block drive |
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0020-12020 | Rotor Spring End Plate |
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0020-12099 | Clip Nest |
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0020-12103 | Spring nest |
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| 0020-14061 | Retainer pin bayonet socket |
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0020-14371 | Calibration tool |
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0020-14373 | Calibration Holder. Blocker |
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| 0020-20117 | OBS Conductor (Part of Kit 0240-23703) |
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| 0020-20119 | Pad DC Bias (Part of Kit 0240-23703) |
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| 0020-20126 | Stand-off Ceramic (Part of Kit 0240-23703) |
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| 0020-21366 | Screw Should (Part of Kit 0240-23703) |
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| 0020-21463 | Shield PVD E5500 |
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0020-21731 | Support door, pre-clean 550 |
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| 0020-21732 | Bracket finger pre-clean 5 |
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| 0020-21750 | Guard finger Etch E5500 |
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| 0020-21754 | Plate pocket, Etch E5500 |
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0020-22182 | Cathode flame spray ETCH E |
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| 0020-22652 | COLIMATOR 1.5 ASPECT RATIO |
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0020-22920 | Shield, aluminium, pre clean 2 5 |
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| 0020-24456 | QUARTZ CATHODE HOLDER PRE |
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0020-26971 | Shutter, disc 8" |
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| 0020-27114 | Isolator MOD (Part of Kit 0240-23703) |
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| 0020-27115 | Hub MOD DC Bias (Part of Kit 0240-23703) |
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| 0020-27116 | Screw Pin MOD DC (Part of Kit 0240-23703) |
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| 0020-27124 | CATHODE PRE CLEAN 2 5500 |
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| 0020-27622 | Hub MOD DC Bias (Part of Kit 0240-23703) |
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| 0020-27740 | CLAMP RING 4 POINT ENDURA |
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| 0020-28906 | Hub DC Bia Mod (Part of Kit 0240-23703) |
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| 0020-28907 | Isolator Ceramic (Part of Kit 0240-23703) |
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| 0020-29409 | Conductor Flexible (Part of Kit 0240-23703) |
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0020-30023 | Bolt, with "captive" head - see photo |
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0020-30031 | Nut, finger, WCVD |
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0020-30032 | Nut, Jam Finger |
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| 0020-30406 | PERF PLATE 150MM BW REV D |
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| 0020-32005 | DISC |
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0020-42067 | Screw, (see photo) |
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0020-48372 | Rod, 170mm (see photo) |
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0020-53636 | Clamp, Filament L/H Q3 |
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0020-80003 | Plate, baffle, arc chamber |
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| 0020-88425 | Adaptor, 4mm o/d air pipe. |
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0020-90743 | Special Nut M3 |
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| 0020-92710 | CUP,FARADAY |
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0020-92720 | Cover, arm, basic |
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0020-93002 | Aperture, fixed |
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| 0020-93489 | SPRING |
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0020-94074 | Insert kit, (heastsink 0040-91316 with gasket 0020-81076), 150mm, 7deg.) |
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0020-94187 | Pillar, Potentiometer mounting |
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| 0020-94509 | CONNECTOR BARREL |
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0020-94830 | Clamp Plate Filament |
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0020-94871 | Insulator |
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0020-95104 | Beam stop, approx 206mm diameter |
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| 0020-95391 | INSERT LARGE |
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0020-96078 | Tube, gasline |
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0020-96606 | Spring finger |
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0020-98327 | Nozzle, oven |
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0020-98880 | Insert, deceleration electrode |
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| 0020-98882 | Electrode extraction |
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| 0020-98922 | Flange, removable |
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| 0020-98953 | DESC FRONT PLATE |
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| 0020-98957 | Strap, electrode |
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| 0020-98960 | DIVIDER ARC CHAMBER |
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| 0020-98961 | Screw MOLV M4X6 |
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| 0020-99214 | Electrode E5 Carbograf 410 |
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| 0020-99239 | INSULATOR. EF. STEPPED |
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| 0020-99242 | E F ELECTRODE CARBOGRAF 410 |
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| 0020-99251 | Aperture, pre-defining |
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0021-14957 | Contact Ring, copper (for 0240-07349) |
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0021-14961 | Bush, Contact Ring, (for 0240-07349) |
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002100072 | Converter DC/DC EM671 |
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| 0030-00217 | ACP 0030-00217,REV "A" |
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0030-00220 | Clip, pedestal |
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| 0040-00290 | GAS TUBE WELDMENT |
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| 0040-01029 | NUT HOIST SUPER AME8116 |
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0040-03857 | Gripper bellows, swift |
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0040-04524 | Tube, electrode feed thru |
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| 0040-09069 | CABLE ASSEMBLY |
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| 0040-20561 | QUARTZ BELL JAR PRE CLEAN |
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0040-90742 | Insulator, ceramic. (see photo) |
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0040-90743 | Insulator, Ceramic (see photo) |
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| 0040-93448 | CLAMP FILAMENT GUIDE ASSY |
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| 0040-95790 | SHOE,PICK-UP,150MM |
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0041-05942 | Cathode, laser, slotted |
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| 0051-06016 | O-Ring 405.26x6.99 White Viton 60 |
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0060-0415 | SCR Control Module |
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0060-2192 | Input Board 32 CH |
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0067-8643 | PCB assembly |
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0090-00046 | Heater, Pad assembly, LID Etch |
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| 01.01.00.11.16 | Lamp, Orienter/Degas E5500 |
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0100 11064 | PWB assembly.right |
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0100-11002W | Digital Input/Output PCB Assy |
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| 0100-11006 | IPS Interface PWB |
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0100-11015 | Power Drive PWB |
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0100-11016 | Torque Converter PWB |
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0100-11020 | RAM PWB |
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0100-11024 | RS 232 isolator board |
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0100-11027 | RS232 Breakout Board |
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0100-11028 | H2 leak detector PWB |
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0100-11030 | Prom A board |
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0100-11031 | Prom B Board |
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0100-11063 | PWB OPTO sensor |
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0100-11064 | Sensor assembly |
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0100-11065 | Video Board |
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0100-11082 | Autoloader interface PCB |
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0100-90293-A | PWBA slotted OPTO |
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| 0100-91145 | Bleed control, AR |
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0100-98049 | Sensor, pcb |
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0100-98072 | Sensor, X-Y pcb 200/300mm |
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0100-98073 | Sensor, X-Y pcb 300mm |
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0120-98083 | Sensor board |
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| 0140-00053 | SWITCH GATE VALE MAG 8336 |
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0140-11059 | Robot Arm Interface |
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0140-98133 | Switch, hood limit.(886) 610.P6 |
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015-11086 | Shuttle Encoder |
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0150-00121 | Switch, Micro, with cable and plug 8330 |
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| 0150-09099 | SWITCH CHAMBER LID CVD 500 |
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| 0150-09276 | Pressure sensor, set -15psi |
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0150-98797 | Cable, Nextmove 100way bus extension, Sec. Control |
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0151-1117 | Isolation valve 2" |
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| 0182042-01 | Fittings |
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| 0190-00028 | CONTROLLER AMT 8111 FLOW 3 |
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| 0190-00062 | O-Ring |
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| 0190-00065 | O-Ring 506.81x5.33 Jointed 2-389 |
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0190-11008 | Pressure transducer 10 Torrs. Baratron type 222BA 00010-B-SPFTG-8VCO s/n9356-2-SENSOR |
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0190-11041 | Keyboard Assembly |
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0190-11068 | Flexible Coupling Bendix |
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0190-11077 | Electrovalve numatic |
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| 0190-70061 | CONTROLLER AMT 8111 FLOW 5 |
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0200-09021 | SHIELD. CERAMIC |
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| 0200-09129 | ISOLATOR 200MM WB |
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0200-09135 | Ring adaptor, ceramic. BWCVD |
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| 0200-09147 | PIN WAFER LIFT 150 WB |
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0200-09152 | Ring, Electrode, 150mm, S55YAS00208, ETCH BWCVD |
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| 0200-09183 | SHIELD NITRIDE CHAM 5000 |
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| 0200-1017 | Fittings Bellows 50mm 18mm dia |
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| 0200-10217 | RING, UNIVERSAL 150/138MM 1JMF |
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0200-20001B | DOOR ETCH CHAMBER E5500 |
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| 0200-20061 | INSULATOR QUARTZ 6" |
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| 0225-01622 | 8300E Controller / Power Supply |
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| 0240-09181 | Alcatel bearing lubricator syringes (2 per pack) |
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0240-11034 | Bonnet Bellows kit |
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0240-11099 | Flow switch |
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0240-17007 | RAM 32 Channel Board |
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| 0240-23703 | KIT DC BIAS HARDWARE |
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| 0240-92743 | INSERT H/S 150/0 |
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| 06-05003-00 | O-Ring TOP COVER |
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| 06-05031-02 | CNTNR DEIONIZER T |
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| 06-05096-00 | FUSE PICO 0.5A |
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| 06-05097-00 | FUSE SLO BLO 3AG |
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| 06-05121-00 | O-Ring BELLOWS B |
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| 06-05130-00 | O-Ring CHAM. WI |
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| 06-05323-00 | ISOLATOR. CERAMIC |
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| 06-05547-00 | O-Ring. BONNET. |
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| 06-14025-02 | CNTR DEIONIZER T |
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| 06-92086-02 | AFC550_(0190-140 |
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| 06-99042-00 | BUSH FIL LEADTHR |
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| 06-99047-00 | FIXED CLIP 150MM |
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| 06-99057-00 | Screw M4 MODIFIE |
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| 06-99076-00 | PRE MRS SLIT |
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0660-01021 | HF Timing PWB |
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0660-01023 | 128K CMOS memory PWB |
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0660-01026 | Inverter Gate Drive |
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0660-01029 | Serial Card Power Board Assy |
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0660-01030 | Quard serial PWB |
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0660-01034 | Interface Board |
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0660-01037 | Test Board Extender |
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| 0690-90188 | E-CLIP RETAINER |
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| 0720-90443 | SLIP RING. MERCURY. NON VA |
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0720-98161 | Connector, banana clip |
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0730-01003 | Inverter Transformer, water cooled |
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0820-01001 | H2 detector 0730-01003 |
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| 0910-01002 | Fuse Quick Blow 3A |
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| 0910-01049 | FUSE PICO 1A 125VR |
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| 0910-01071 | FUSE NORM BLO 3AG 10 |
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0910-90054 | Fuse, 3A, 250V, 1.25", slow blow |
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| 10011006 | IPS Interface PWB |
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10011015 | Power Drive PWB |
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10011016 | Torque Converter PWB |
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10011020 | RAM PWB |
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10011024 | RS 232 isolator board |
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10011027 | RS232 Breakout Board |
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10011028 | H2 leak detector PWB |
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10011030 | Prom A board |
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10011031 | Prom B Board |
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10011063 | PWB OPTO sensor |
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1003-14913 | Bellows. KF25 S.S, NW25, 3.94" |
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1010-01047 | Bulb, 12V, 13W, BA15s, single contact bayonet, 25811, GE-93 |
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1010-90016 | Lamp, cartridge, neon, red. |
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1011007 | Plate Position Detector |
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1011084 | End controller |
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1011128 | Robot Position Detector |
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| 1011138 | 1ND Defector Robot |
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1011173 | Vacuum Tongue |
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1090605 | Assembly, MVG clip, 125-150.0 deg. |
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1120-01010 | Prism |
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1200-01048 | Relay IPS main contactor. Westinghouse A201K1CA 6710C54G06 |
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1270-00152 | Switch, Pressure type ISE1-01-18 |
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| 1270-00153 | Switch, Pressure SMC |
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| 1270-01115 | THERMOSTAT AMT8111 B/PLATE |
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1270-01152 | Switch Temperature Fenwal |
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1270-01153 | pressure switch 30 |
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1270-01217 | Flow Switch |
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1270-01218 | Pressure Switch Wasco Inc 1A 115VAC |
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1270-01243 | Switch Airflow Mcdonnell & Miller AF1S |
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1270-01303 | Diaphragm Pressure switch 30-3. Leybold SM 42 16407 D 90 12 00481 |
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1270-01305 | Thermal Switch 125C |
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1390-90148 | Filament, wire |
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140-11059 | Robot Arm Interface |
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1400-01021 | Flow Sensor Brass Proteus Ind. Ser#:S02651 |
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1400-90014 | Sensor, thru-beam, Skanamatic type L331 |
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1400-98005 | Sensor Analogue, ultrasonic |
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1400-98006 | Sensor, thru-beam, Keyence PS 52 |
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| 1410-01015 | HEATER BASEPLATE 8330 |
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150-00121 | Switch, Micro, with cable and plug 8330 |
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| 175-146W | MONITOR 14" CUB TO IBM SPEC. R |
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19011008 | Pressure transducer 10 Torrs. Baratron type 222BA 00010-B-SPFTG-8VCO s/n9356-2-SENSOR |
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19011041 | Keyboard Assembly |
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19011068 | Flexible Coupling Bendix |
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19011077 | Electrovalve numatic |
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20-06978 | Spring, pedestal |
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20-11434 | Up and Down Lift Flange |
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20-11755 | Pin Insert |
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20-11930 | Block drive |
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20-12020 | Rotor Spring End Plate |
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20-12099 | Clip Nest |
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20-12103 | Spring nest |
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20-14371 | Calibration tool |
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20-14373 | Calibration Holder. Blocker |
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200-09021 | SHIELD. CERAMIC |
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200-09152 | Ring, Electrode, 150mm, S55YAS00208, ETCH BWCVD |
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2026971 | Shutter, disc 8" |
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2090743 | Special Nut M3 |
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24011034 | Bonnet Bellows kit |
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24011099 | Flow switch |
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24017007 | RAM 32 Channel Board |
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| 2683-62200 | RING ARDEL AMT8111 |
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| 2718724EO1 | Pedestal 4" AMT 8111 |
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| 3060-90060 | Bearing, 6/19x6 DDR1960R 626 |
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| 3080-01015 | BELTS TIMING 1/5P |
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| 3080-01020 | INDEXER DRIVE BELT |
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| 3080-01031 | Belt Toothed 225-3M 304AG |
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| 3080-01038 | BELT SUSCEPTOR/W-LIFT AMT |
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| 3080-01063 | Belt Toothed 110XL037 2877 |
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3080-01167 | Belt, timing (toothed), 16x445x5 |
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3080-90007 | Timing Belt 6.35Wx21. Gates 840MXL 025 (321DS) |
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3150-98002 | Cam follower, 19 o/d, x6 i/d x 14 |
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3200-00021 | Nut, Slide, M2.5 |
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| 3230-90015 | T-piece, helium flex line pressurised. |
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| 3300-90691 | |
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3310-01032 | Gauge pressure Set |
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3310-01033 | Gauge Pressure -30-100Psi Model JK 50 |
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3310-01034 | Gauge Pressure Set Manometer |
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3310-01035 | Gauge Pressure Set Span Instrument Mod IPS122 #1863892 |
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3310-01036 | Gauge pressure set. Span instruments model IPS122 |
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3310-01042 | Liquid gauge 0-200 P |
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3310-90003 | Ionization guage, Type 572, Bayard-Alpert |
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3320-01032 | Gasket, Spira-Shield HIGH ETCH E5500 |
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3320-01033 | Gasket, Spira-Shield 3132 ETCH E5500 |
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3320-02241 | Gasket, 6" CFF OFHC Copper, PVD Window Conflat 55 |
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3320-90034 | Gasket, Graphite to AMAT spec |
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3420-90088 | Bush, Insulating. TYPE SF11, Ceramic |
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| 3500-90011 | NUT FULL HEX M3 |
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| 3500-90012 | NUT FULL HEX M4 |
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3550-01057 | Rotation pin |
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| 3620-01018 | PUMP CRYO ADSORBING |
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| 3630-01083 | Retainer Ring External D (Part of Kit 0240-23703) |
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| 3630-01092 | Retainer Ring Inernal 5 (Part of Kit 0240-23703) |
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| 3690-01121 | Screw UPPER LID CAN ETCH E |
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| 3690-01263 | Screw PANHEAD 8-32 X 1/2" 5.5 |
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| 3690-01451 | Screw VENTED |
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| 3690-01458 | 832 X 3 /8 SOC CAP VENT SS COC |
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| 3690-01478 | Screw.SOC HD.8-32X1/4 |
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3690-01545 | Screw |
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| 3690-01869 | Screw Cap Socket Head (Part of Kit 0240-23703) |
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| 3690-01903 | Screw CAP PRECLEAN 5500 |
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| 3690-02569 | Screw SHIELD PRECLEAN 2 55 |
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| 3690-02848 | Screw Cap Flat Head (Part of Kit 0240-23703) |
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| 3690-02967 | Screw Cap Flat Head (Part of Kit 0240-23703) |
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3690-90324 | Screw, hex skt head (Allen) M3X6mm |
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| 3690-90329 | Screw, hex skt head (Allen) M3X20mm |
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| 3690-90433 | Screw, Skt, Cap, M6x10, Stainless steel |
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| 3690-90520 | Grub, Screw, SKT Set Cup Point S/S M2.5x4mm |
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| 3696-01448 | SCR CAP FLT HD 2-56 X 1 |
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| 3700-01008 | O-Ring 7.59x2.62 Viton |
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| 3700-01011 | O-Ring 11.11x1.78 Viton AMT 2000 |
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| 3700-01031 | O-Ring 3.68x1.78 CMP |
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| 3700-01036 | O-Ring 12.37x2.62 |
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| 3700-01041 | O-Ring ID 1.171 CS |
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| 3700-01043 | O-Ring ID 1.674 CS |
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| 3700-01058 | O-Ring BASE U/D PED |
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| 3700-01068 | O-Ring ID .987 X . |
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| 3700-01080 | O-Ring 0.739x0.070" 18.77x1.78 BS018 |
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| 3700-01081 | O-Ring 52.07x2.62 Viton |
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| 3700-01083 | O-Ring 21x2.62 GAS MIXER |
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| 3700-01087 | CENTRING Ring Aluminium/Viton NW40 |
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| 3700-01088 | Seal, Centring ring assembly NW50 |
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| 3700-01089 | SEAL CTR RING ASSY NW25 Stainless Viton |
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| 3700-01093 | O-Ring 26.64x2.62 Viton |
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| 3700-01094 | O-Ring 9.19x2.62 Viton |
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| 3700-01118 | O-Ring 26.5x3.53 Viton |
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| 3700-01127 | O-Ring 209.22x2.62 |
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| 3700-01131 | O-Ring 56.82x2.62 Viton |
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3700-01134 | O-Ring 171.05x3.53 Viton |
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| 3700-01136 | O-Ring 456.06x5.33 |
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| 3700-01164 | O-Ring 1.051x0.70" 26.70x1.78 Viton 2-023 |
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| 3700-01165 | O-Ring 2-129 1.549x0.103" 39.34x2.262 Viton |
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| 3700-01171 | O-Ring 145.42x6.99 |
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| 3700-01211 | O-Ring 2-265 196.44x3.53 CATHODE (BOTTOM) |
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| 3700-01218 | O-Ring 2.90x1.78 Gas feedthrough |
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| 3700-01223 | O-Ring 215.49x3.53 ETCH CH BTM |
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| 3700-01225 | O-Ring 50.80x3.53 Viton |
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| 3700-01227 | O-Ring 45.69x2.62 PUMP FLANGE |
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| 3700-01239 | O-Ring 64.77x2.62 Viton |
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| 3700-01245 | O-Ring 9.25x1.78 |
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| 3700-01258 | O-Ring 50.52x1.78 Viton (2-033) |
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| 3700-01259 | O-Ring 34.52x3.53 Viton |
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| 3700-01272 | O-Ring 266.29x3.53 Viton (Cermic Isolator) |
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| 3700-01335 | O-Ring 0.114x0.070" 2.90x1.78 2-006 |
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| 3700-01339 | O-Ring 405.26x3.53 Brown Viton WCVD LID |
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| 3700-01340 | O-Ring 9.12x3.53 Brown Viton CATHODE |
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| 3700-01341 | O-Ring 47.29x2.62 Brown Viton ROBOT/DRIVE TOP SEA |
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| 3700-01347 | O-Ring 91.67x3.53 Brown Viton |
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| 3700-01348 | O-Ring 240.89x3.53 WINDOW S/ELEVATOR 2-272 A Brown Viton |
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| 3700-01372 | O-Ring 2-221 36.09x3.53 Brown Viton TRAN SLIT V GENERAL |
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| 3700-01426 | O-Ring 720x5.33 Brown Viton |
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| 3700-01534 | O-Ring 10.77x2.62 Chemraz (Kalrez) BARATRON MANIFOLD |
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| 3700-01544 | O-Ring 3.81x1.27 (0.15x0.05") Brown Viton for Shuttle Blade |
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| 3700-01927 | O-Ring 355.19x3.53 Kalrez 4079 |
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| 3700-02431 | O-Ring 351x3.53 Viton 75 Custom Size 5-073 |
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3700-02436 | O-Ring Viton 75 |
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| 3700-02440 | O-Ring 28.24x2.62 Viton |
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| 3700-02441 | O-Ring 20.3x2.62 |
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| 3700-02442 | O-Ring 10.77x2.62 Viton 75 |
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| 3700-02448 | O-Ring 9x4 Viton |
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| 3700-02502 | O-Ring 10.77x2.62 Kalrez 4079 Ultra Pure |
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| 3700-02503 | O-Ring 18.64x3.53 Kalrez 4079 UP |
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3700-02575 | Kit, Repair type 6075-031C, for Deublin Unions |
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| 3700-02719 | O-Ring 44.04x3.53 Brown Viton |
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| 3700-02720 | O-Ring 6.07x1.78 Viton |
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| 3700-90005 | O-Ring 18.64x3.53 Viton |
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| 3700-90008 | O-Ring 151.99x3.53 Viton 70 |
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| 3700-90026 | FILTER DEIONIZING |
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3700-90112 | O-Ring 85.09x5.33 Viton |
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3700-90122 | O-Ring 107.55x3.53 Viton |
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3700-90135 | Seal, Viton, ISO 100 CO |
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| 3700-90137 | O-Ring 113.67x5.33 Viton |
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| 3700-90148 | Washer / Seal 6.35/18x2.2 PTFE |
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3700-90196 | O-Ring viton 0220 |
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| 3700-90245 | O-Ring 104.5x5.7 1043-57 Viton |
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| 3700-90267 | O-RING BS378 VITON |
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3720-00124 | Gasket, Spira-Shield, type NL-103-NC |
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3780-00035 | Spring, 91.4mm dia, 57.15 long, 1.02 wide |
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3780-01062 | Bendix Fexture Pivot |
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| 3780-90089 | SPRING |
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3790-00337 | Spacer, Hex, M4x10mm Tapped |
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| 3840-01008 | TAPE AMT2000 SI RUBBER (9 |
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3870-01109 | Valve pneumatic 1/2. Colman MK-2690 |
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3870-01171 | Valve bellow sealed |
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| 3870-01458 | SEAL ROUGH/V CONFLAT PVD E |
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| 3870-98020 | Valve, soft start, PN |
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| 3880-01004 | Washer Flat #4 St/St (Part of Kit 0240-23703) |
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3880-01007 | Washer, flat. Lid cover. CVD CHM |
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| 3880-01022 | Washer, Locking Split #4 (Part of Kit 0240-23703) |
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| 3880-01309 | Washer, LOCK PRE-CLEAN 5501 |
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| 3880-90020 | Washer, PLAIN M3 |
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| 3880-90021 | Washer, PLAIN M4 |
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3880-90029 | Washer, Spring M3 |
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| 3880-90030 | Washer, Spring M4 |
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3940-90046 | Stud, Slotted Dome, HD 400 series, zinc 440802 |
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3940-90048 | Retainer 82-32-109-20 |
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3940-90058 | Stud, 1/4 turn, 82-12-400-16 (mates with 3940-90059) |
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3940-90059 | Receptacle, 1/4 turn 82-35-302-15 (mates with 3940-90058) |
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4020-01033 | Filter, Air |
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4020-01040 | Filter, in-line, mini Gaskleen, |
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4020-01057 | Mist eliminator |
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| 4020-01060 | FLTR IN LINE GAS SST |
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4020-01062 | Filter, in-line, mini Gaskleen, 3000psi, 250deg C. .03uM (1/4-TO-1/4) |
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| 4318545EO1 | Ardel Tray spacer AMT8 |
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| 5070-01009 | HI-VACUUM GREASE |
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| 5070-90006 | Pump, Oil Diffusion DC704 |
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60-2192 | Input Board 32 CH |
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| 646506 | Insulator, ceramic. Part of lamp module |
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660-01021 | HF Timing PWB |
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660-01023 | 128K CMOS memory PWB |
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660-01026 | Inverter Gate Drive |
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660-01029 | Serial Card Power Board Assy |
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660-01030 | Quard serial PWB |
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660-01034 | Interface Board |
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660-01037 | Test Board Extender |
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| 673405 | Shield, heat passivation |
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| 7250-01900 | O-Ring 20.35x1.78 Viton AME8116 |
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| 7250-04400 | O-Ring AME8116AL |
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| 73-10187-00 | BELT MT TRK 3/16 5500 AL55 |
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730-01003 | Inverter Transformer, water cooled |
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| 8100N | Ion T/C Controller |
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820-01001 | H2 detector 0730-01003 |
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9010-00518 | Pick up loop assembly |
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9150-00682 | Booster, HF CBLS, with connector |
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9150-01031 | Cable assembly, with positive limit sensor |
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9240-04161 | Kit, HD-PFS Head, 67% spares. Packed in clean room 1000 |
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9240-04161TCCA | Kit, HD-PFS Head, 67% spares. Packed in clean room 1000 |
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999210 | Vaccum Pump |
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| A117114 | Tool, Target Removal (made by Hummel) |
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AM2720A | Microwave control module |
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| SLA7A250V-1C9 | Switch, push on, push off, SLA7A250V-1C9 |
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UD01-022 | Spinner motor servo module SMBM4-AF (DNS etcher) |
