Spares from: Applied (N-Cons), Applied Materials (AMAT), |
APPLIED (N-CONS) | |||
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1210-02418 | Resistor, 20R (20ohms), 50W | 121002418. |
APPLIED MATERIALS (AMAT) | |||
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0010-00183 | Motor, Z-axis stepper robot | 001000183. |
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0010-11007 | Plate, Position Detector | 001011007. |
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0010-11084 | End controller | 001011084. |
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0010-11128 | Robot Position Detector | 001011128. |
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0010-11138 | 1ND Defector Robot | 001011138. |
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0010-11173 | Vacuum Tongue | 001011173. |
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0010-14083 | Retainer Pin Bayonet Socket | 001014083. |
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0010-90162 | Assembly, Resistor chain (2x 30Megohms) | 001090162. |
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0010-90605 | Assembly, MVG clip, 125-150.0 deg. | 001090605. |
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0010-90699 | Resistor string, MG 780 1MEG 2% | 001090699. |
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0015-00054 | Pad, Head conductive 8330 | 001500054. |
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0015-09056 | Bellows, hoop solid | 001509056. |
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0015-09179 | Washer, Concave | 001509179. |
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0015-11086 | Shuttle Encoder | 001511086. |
![]() | 0015-20035 | Screw, Insulator (Part of Kit 0240-23703) | 001520035. |
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00151-1117 | Valve, Isolation 2" | 001511117. |
![]() | 0020-01074 | Cup Vac Pickup 8100 | 002001074. |
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0020-01350 | Insulator, Bias | 002001350. |
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0020-03466 | Spring, hub gripper 8336 | 002003466. |
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0020-03553 | Screw, Etch chamber cover | 002003553. |
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0020-03652 | Film, Protective | 002003652. |
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0020-05615 | Hex insulator (8310) | 002005615. |
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0020-06048 | Bushing, Throttle valve | 002006048. |
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0020-06978 | Spring, pedestal | 002006978. |
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0020-09376 | O-Ring, 329.79x3.53 Viton, Bottom cover | 002009376. |
![]() | 0020-09601 | Filter, UV MCD10218 | 002009601. |
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0020-10815 | Shield 150mm EC | 002010815. |
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0020-10888 | Screw, Half dog point, BWCVD | 002010888. |
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0020-10889 | Screw, 6/32x3/8" | 002010889. |
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0020-10890 | Screw, panhead, 6-32 X 1/2" Aluminium | 002010890. |
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0020-10941 | Isolator Teflon ring, 200mm inner diameter, AMT 5000 | 002010941. |
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0020-11434 | Up and Down Lift Flange | 002011434. |
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0020-11755 | Pin, Insert | 002011755. |
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0020-11930 | Block Drive | 002011930. |
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0020-12020 | Rotor Spring End Plate | 002012020. |
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0020-12099 | Clip, Nest | 002012099. |
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0020-12103 | Spring, Nest | 002012103. |
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0020-14371 | Calibration Tool | 002014371. |
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0020-14373 | Calibration Holder. Blocker | 002014373. |
![]() | 0020-20117 | OBS Conductor (Part of Kit 0240-23703) | 002020117. |
![]() | 0020-20119 | Pad, DC Bias (Part of Kit 0240-23703) | 002020119. |
![]() | 0020-20126 | Stand-off Ceramic (Part of Kit 0240-23703) | 002020126. |
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0020-21265 | Wafer lift (C) | 002021265. |
![]() | 0020-21366 | Screw, Should (Part of Kit 0240-23703) | 002021366. |
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0020-21463 | Shield PVD E5500 | 002021463. |
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0020-21731 | Support door, pre-clean 550 | 002021731. |
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0020-21732 | Bracket, finger pre-clean 5 | 002021732. |
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0020-21750 | Guard finger Etch E5500 | 002021750. |
![]() | 0020-21754 | Plate pocket, Etch E5500 | 002021754. |
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0020-22182 | Cathode Flame Spray etch E | 002022182. |
![]() | 0020-22652 | Colimator, 1.5 ASPECT RATIO | 002022652. |
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0020-22920 | Shield, Aluminium, Pre Clean 2 5 | 002022920. |
![]() | 0020-24456 | Insulator, Quartz, 6" SMF Ext pass thru | 002024456. |
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0020-26971 | Shutter, disc 8" | 002026971. |
![]() | 0020-27114 | Isolator MOD (Part of Kit 0240-23703) | 002027114. |
![]() | 0020-27115 | Hub MOD DC Bias (Part of Kit 0240-23703) | 002027115. |
![]() | 0020-27116 | Screw, Pin MOD DC (Part of Kit 0240-23703) | 002027116. |
![]() | 0020-27124 | Pedestal, PCII 6" | 002027124. |
![]() | 0020-27622 | Hub MOD DC Bias (Part of Kit 0240-23703) | 002027622. |
![]() | 0020-27740 | Clamp, Ring 4 Point Endura | 002027740. |
![]() | 0020-28906 | Hub DC Bia Mod (Part of Kit 0240-23703) | 002028906. |
![]() | 0020-28907 | Isolator Ceramic (Part of Kit 0240-23703) | 002028907. |
![]() | 0020-29409 | Conductor Flexible (Part of Kit 0240-23703) | 002029409. |
![]() | 0020-30000 | Clamp, pin, adjustable, Tungsten | 002030000. |
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0020-30023 | Screw, with "captive" head - see photo | 002030023. |
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0020-30031 | Nut, finger, WCVD | 002030031. |
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0020-30032 | Nut, Jam Finger | 002030032. |
![]() | 0020-30406 | Perf. plate 150mm BW REV D | 002030406. |
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0020-32005 | DISC | 002032005. |
![]() | 0020-34043 | Cover, insulator block | 002034043. |
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0020-34073 | Alignment wing | 002034073. |
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0020-42067 | Screw, (see photo) | 002042067. |
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0020-48372 | Rod, 170mm (see photo) | 002048372. |
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0020-53636 | Clamp, Filament L/H Q3 | 002053636. |
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0020-80003 | Plate, Baffle, Arc Chamber | 002080003. |
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0020-80215 | Clamp, Filament | 002080215. |
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0020-88425 | Adaptor, 4mm o/d air pipe. | 002088425. |
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0020-90643 | Electrode, deceleration | 002090643. |
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0020-90743 | Nut, M3 Special | 002090743. |
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0020-92511 | Shield, Chamber | 002092511. |
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0020-92512 | Flight shield | 002092512. |
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0020-92566 | Insert, | 002092566. |
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0020-92709 | Aperture, frame resolving | 002092709. |
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0020-92710 | Cup, Faraday | 002092710. |
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0020-92720 | Cover, Arm, Basic | 002092720. |
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0020-93002 | Aperture, Fixed | 002093002. |
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0020-93489 | Spring | 002093489. |
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0020-94035 | Vane | 002094035. |
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0020-94074 | Insert, Kit, (Heastsink 0040-91316 with Gasket 0020-81076), 150mm, 7deg.) | 002094074. |
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0020-94075 | Insert, H/S 150/0 | 002094075. |
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0020-94187 | Pillar, Potentiometer mounting | 002094187. |
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0020-94223 | Apertures | 002094223. |
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0020-94509 | Connector, Barrel | 002094509. |
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0020-94830 | Clamp, Plate Filament | 002094830. |
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0020-94848 | Strip conductor | 002094848. |
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0020-94857 | Gasket, graphite | 002094857. |
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0020-94871 | Insulator | 002094871. |
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0020-94899 | Yoke support | 002094899. |
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0020-95104 | Beam Stop, approx 206mm Diameter | 002095104. |
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0020-95110 | Connector, copper | 002095110. |
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0020-95391 | Insert, large | 002095391. |
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0020-96078 | Tube, gasline | 002096078. |
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0020-96606 | Spring, finger | 002096606. |
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0020-97053 | Screw, Graphite retention, new style liner to P58 | 002097053. |
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0020-97975 | Electrode, deceleration | 002097975. |
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0020-98327 | Nozzle, Oven | 002098327. |
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0020-98484 | Insert, large upper exit flight tube | 002098484. |
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0020-98880 | Insert, deceleration electrode | 002098880. |
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0020-98882 | Electrode extraction | 002098882. |
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0020-989222 | Flange, removable | 0020989222. |
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0020-98953 | DESC Front plate | 002098953. |
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0020-98957 | Strap, Electrode | 002098957. |
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0020-98959 | Filament guide, 0.073 diameter | 002098959. |
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0020-98960 | Divider, ARC Chamber | 002098960. |
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0020-98961 | Screw, MOLV M4X6 | 002098961. |
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0020-99214 | Electrode E5 Carbograf 410 | 002099214. |
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0020-99239 | Insulator, EF. STEPPED | 002099239. |
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0020-99242 | E F Electrode Carbograf 410 | 002099242. |
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0020-99251 | Aperture, Pre-Defining (Graphite) | 002099251. |
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0021-14957 | Contact Ring, copper (for 0240-07349) | 002114957. |
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0021-14961 | Bush, Contact Ring, (for 0240-07349) | 002114961. |
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002100072 | Converter, DC/DC EM671 | 002100072 |
![]() | 0030-00217 | ACP 0030-00217,REV "A" | 003000217. |
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0030-00220 | Clip, pedestal | 003000220. |
![]() | 0040-00290 | Gas Tube Weldment | 004000290. |
![]() | 0040-01029 | Nut, Hoist Super AME8116 | 004001029. |
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0040-03857 | Gripper Bellows, Swift | 004003857. |
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0040-04524 | Tube, electrode feed thru | 004004524. |
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0040-09069 | Cable, Assembly | 004009069. |
![]() | 0040-20561PC | Quartz Bell Jar Pre Clean | 004020561PC. |
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0040-90734 | Insulator, Type ASS486/AL/M | 004090734. |
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0040-90742 | Insulator, ceramic. (see photo) | 004090742. |
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0040-90743 | Insulator, Ceramic (See Photo) | 004090743. |
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0040-93448 | Clamp, Filament Guide Assy | 004093448. |
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0040-95790 | Shoe, pick-up,150mm | 004095790. |
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0041-05942 | Cathode, laser, slotted | 004105942. |
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00516016 | O-Ring, 405.26x6.99 White Viton 60 | 00516016. |
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0060-0415 | SCR Control Module | 00600415. |
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0060-2192 | PCB, Input Board 32 CH | 00602192. |
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0067-8643 | PCB, assembly | 00678643. |
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0090-00046 | Heater, Pad assembly, LID Etch | 009000046. |
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01.01.00.11.16 | Lamp, Orienter/Degas E5500 | 0101001116. |
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0100 11064 | PCB, assembly.right | 010011064. |
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0100-11002W | PCB, Digital Input/Output Assy | 010011002W. |
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0100-11006 | PCB, IPS Interface | 010011006. |
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0100-11015 | PCB, Power Drive | 010011015. |
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0100-11016 | PCB, Torque Converter | 010011016. |
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0100-11020 | PCB, RAM | 010011020. |
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0100-11024 | PCB, RS 232 Isolator Board | 010011024. |
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0100-11027 | PCB, RS232 Breakout Board | 010011027. |
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0100-11028 | PCB, H2 Leak Detector | 010011028. |
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0100-11030 | PCB, Prom A board | 010011030. |
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0100-11031 | PCB, Prom B Board | 010011031. |
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0100-11063 | PCB, Opto Sensor | 010011063. |
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0100-11064 | Sensor assembly | 010011064. |
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0100-11065 | PCB, Video Board | 010011065. |
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0100-11082 | PCB, Autoloader Interface | 010011082. |
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0100-90293-A | PCB, Slotted OPTO | 010090293A. |
![]() | 0100-91145 | Bleed control, AR | 010091145. |
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0100-98049 | PCB, Sensor, pcb | 010098049. |
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0100-98072 | PCB, Sensor, X-Y, 200/300mm | 010098072. |
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0100-98073 | PCB, Sensor, X-Y PCB 300mm | 010098073. |
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0120-98083 | PCB, Sensor board | 012098083. |
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0130-11003 | EV Panel (0100-11003) | 013011003. |
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0140-00053 | Switch, gate valve Mag 8336 | 014000053. |
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0140-09025 | Swotch Harness Etch Cover Interlock | 014009025. |
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0140-11059 | Robot Arm Interface | 014011059. |
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0140-98133 | Switch, Hood Limit.(886) 610.P6 | 014098133. |
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015-11086 | Shuttle Encoder | 01511086 |
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0150-00121 | Switch, micro, with cable and plug 8330 | 015000121. |
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0150-09099 | Switch, chamber lid CVD 500 | 015009099. |
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0150-09276 | Pressure sensor, set -15psi | 015009276 |
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0150-98797 | Cable, Nextmove 100way Bus Extension, Sec. Control | 015098797. |
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0182042-01 | Fittings | 018204201. |
![]() | 0190-00028 | Controller, AMT 8111 Flow 3 | 019000028. |
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0190-00062 | O-Ring, 490x5.5, Viton | 019000062. |
![]() | 0190-00065 | O-Ring, 506.81x5.33 Jointed | 019000065. |
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0190-11008 | Pressure Transducer 10 Torrs. Baratron Type 222BA 00010-B-SPFTG-8VCO s/n9356-2-1 | 019011008. |
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0190-11041 | Keyboard Assembly | 019011041. |
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0190-11068 | Flexible Coupling Bendix | 019011068. |
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0190-11077 | Electrovalve numatic | 019011077. |
![]() | 0190-70061 | Controller, AMT 8111 Flow 5 | 019070061. |
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0200-09021 | Shield, ceramic (or adapter plate) | 020009021. |
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0200-09129 | Isolator, 200mm WB | 020009129. |
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0200-09135 | Ring adaptor, ceramic. BWCVD | 020009135. |
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0200-09147 | Pin, Wafer Lift 150 WB | 020009147. |
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0200-09152 | Ring, Electrode, 150mm, S55YAS00208, ETCH BWCVD | 020009152. |
![]() | 0200-09183 | Shield Nitride Cham 5000 | 020009183. |
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0200-1017 | Fittings Bellows 50mm 18mm dia | 02001017. |
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0200-10217 | Ring, Universal 150/138mm 1JMF | 020010217. |
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0200-20001B | Door, etch chamber E5500 | 020020001B. |
![]() | 0200-20061 | Insulator, Quartz 6" | 020020061. |
![]() | 0225-01622 | 8300E Controller / Power Supply | 022501622. |
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0240-09181 | Alcatel bearing lubricator syringes (2 per pack) | 024009181. |
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0240-11034 | Bonnet Bellows Kit | 024011034. |
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0240-11099 | Switch, flow | 024011099. |
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0240-17007 | PCB, RAM 32 Channel Board | 024017007. |
![]() | 0240-23703 | Kit, DC bias hardware | 024023703. |
![]() | 06-05031-02 | CNTNR Deionizer T | 060503102. |
![]() | 06-05096-00 | Fuse, PICO 0.5A | 060509600. |
![]() | 06-05097-00 | Fuse, SLO BLO 3AG | 060509700. |
![]() | 06-05130-00 | O-Ring, CHAM. WI | 060513000. |
![]() | 06-05323-00 | Isolator, Ceramic | 060532300. |
![]() | 06-14025-02 | CNTR Deionizer T | 061402502. |
![]() | 06-92086-02 | AFC550_(0190-140 | 069208602. |
![]() | 06-99042-00 | Bush, Filament Leadthrough | 069904200. |
![]() | 06-99047-00 | Fixed Cup 150mm | 069904700. |
![]() | 06-99057-00 | Screw, M4 MODIFIE | 069905700. |
![]() | 06-99076-00 | PRE MRS Slit | 069907600. |
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0660-01021 | PCB, HF Timing | 066001021. |
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0660-01023 | PCB, 128K CMOS Memory | 066001023. |
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0660-01026 | PCB, Inverter Gate Drive | 066001026. |
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0660-01029 | PCB, Serial Card Power Board Assy | 066001029. |
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0660-01030 | PCB, Quad Serial | 066001030. |
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0660-01034 | PCB, Interface Board | 066001034. |
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0660-01037 | Test Board Extender | 066001037. |
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0690-90188 | E-clip retainer | 069090188. |
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0720-90443 | Slip ring, Mercury, Non vacuum | 072090443. |
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0720-98161 | Connector, Banana Clip | 072098161. |
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0730-01003 | Transformer, Inverter, Water Cooled | 073001003. |
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0820-01001 | H2 Detector 0730-01003 | 082001001. |
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0910-01002 | Fuse, Quick Blow 3A | 091001002. |
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0910-01049 | Fuse, PICO 1A 125VR | 091001049. |
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0910-01071 | Fuse, NORM BLO 3AG 10 | 091001071. |
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0910-90047 | Fuse 25amp, Neozed DO2 | 091090047. |
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0910-90054 | Fuse, 3A, 250V, 1.25", slow blow | 091090054. |
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10011006 | PCB, IPS Interface | 10011006 |
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10011015 | PCB, Power Drive | 10011015 |
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10011016 | PCB, Torque Converter | 10011016 |
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10011020 | PCB, RAM | 10011020 |
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10011024 | PCB, RS 232 Isolator Board | 10011024 |
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10011027 | PCB, RS232 Breakout Board | 10011027 |
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10011028 | PCB, H2 Leak Detector | 10011028 |
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10011030 | PCB, Prom A board | 10011030 |
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10011031 | PCB, Prom B Board | 10011031 |
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10011063 | PCB, Opto Sensor | 10011063 |
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1003-14913 | Bellows. KF25 S.S, NW25, 3.94" | 100314913. |
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1010-01047 | Lamp, 12V, 13W, BA15s, single contact bayonet, 25811, GE-93 | 101001047. |
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1010-90016 | Lamp, Cartridge, Neon, Red. | 101090016. |
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1011007 | Plate, Position Detector | 1011007 |
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1011084 | End controller | 1011084 |
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1011128 | Robot Position Detector | 1011128 |
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1011173 | Vacuum Tongue | 1011173 |
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1090605 | Assembly, MVG clip, 125-150.0 deg. | 1090605 |
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1120-01010 | Prism | 112001010. |
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1200-01048 | Contactor, 110VAC coil, 4pole, 575V, 27A, (IPS main contactor) | 120001048. |
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1270-00152 | Switch, Pressure type ISE1-01-18 | 127000152. |
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1270-00153 | Switch, Pressure SMC | 127000153. |
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1270-01115 | Thermostat AMT8111 B/Plate | 127001115. |
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1270-01152 | Switch, Temperature Fenwal | 127001152. |
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1270-01153 | Switch, Pressure, 30 | 127001153. |
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1270-01217 | Switch, flow | 127001217. |
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1270-01218 | Switch, pressure, Wasco Inc 1A 115VAC | 127001218. |
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1270-01243 | Switch, Airflow Mcdonnell & Miller AF1S | 127001243. |
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1270-01303 | Diaphragm Pressure switch 30-3. Leybold SM 42 16407 D 90 12 00481 | 127001303. |
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1270-01305 | Switch, Thermal, 125C | 127001305. |
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1310-90015 | Thermocouple, for MK2 oven, Tip: 1.5mm diameter x 115mm length | 131090015. |
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1390-90148 | Filament, wire | 139090148. |
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140-11059 | Robot Arm Interface | 14011059 |
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1400-01021 | Flow Sensor Brass Proteus Ind. Ser#:S02651 | 140001021. |
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1400-90014 | Sensor, Thru-beam, Skanamatic Type L331 | 140090014. |
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1400-98005 | Sensor, Analogue, ultrasonic | 140098005. |
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1400-98006 | Sensor, thru-beam, Keyence PS 52 | 140098006. |
![]() | 1410-01015 | Heater Basplate 8330 | 141001015. |
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150-00121 | Switch, micro, with cable and plug 8330 | 15000121 |
![]() | 175-146W | Monitor, 14" CUB TO IBM SPEC. R | 175146W. |
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19011008 | Pressure Transducer 10 Torrs. Baratron Type 222BA 00010-B-SPFTG-8VCO s/n9356-2-1 | 19011008 |
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19011041 | Keyboard Assembly | 19011041 |
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19011068 | Flexible Coupling Bendix | 19011068 |
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19011077 | Electrovalve numatic | 19011077 |
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20-06978 | Spring, pedestal | 2006978 |
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20-11434 | Up and Down Lift Flange | 2011434 |
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20-11755 | Pin, Insert | 2011755 |
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20-11930 | Block Drive | 2011930 |
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20-12020 | Rotor Spring End Plate | 2012020 |
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20-12099 | Clip, Nest | 2012099 |
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20-12103 | Spring, Nest | 2012103 |
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20-14371 | Calibration Tool | 2014371 |
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20-14373 | Calibration Holder. Blocker | 2014373 |
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200-09021 | Shield, ceramic (or adapter plate) | 20009021 |
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200-09152 | Ring, Electrode, 150mm, S55YAS00208, ETCH BWCVD | 20009152 |
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2026971 | Shutter, disc 8" | 2026971 |
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2090743 | Nut, M3 Special | 2090743 |
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24011034 | Bonnet Bellows Kit | 24011034 |
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24011099 | Switch, flow | 24011099 |
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24017007 | PCB, RAM 32 Channel Board | 24017007 |
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2683-62200 | Ring, Ardel AMT8111 | 268362200. |
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2718724EO1 | Pedestal 4" AMT 8111 | 2718724EO1. |
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305-2000 | PCB, PUMA Interface A M00G, A58778-001, REV C | 3052000. |
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3060-90060 | Bearing, 6/19x6 DDR1960R 626 | 306090060. |
![]() | 3080-01015 | Belt, Timing 1/5P | 308001015. |
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3080-01020 | Belt, Drive, Indexer | 308001020. |
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3080-01031 | Belt, Toothed 225-3M 304AG | 308001031. |
![]() | 3080-01038 | Belt, susceptor, w-lift AMT | 308001038. |
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3080-01063 | Belt, Toothed 110XL037 2877 | 308001063. |
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3080-01167 | Belt, timing (toothed), 16x445x5 | 308001167. |
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3080-90007 | Belt, Timing, 6.35Wx21. Gates 840MXL 025 (321DS) | 308090007. |
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3150-98002 | Cam Follower, 19 o/d, x6 i/d x 14 | 315098002. |
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3200-00021 | Nut, Slide, M2.5 | 320000021. |
![]() | 3230-90015 | T-piece, helium flex line pressurised. | 323090015. |
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3300-90691 | Fit Feed Through | 330090691. |
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3310-01032 | Gauge, pressure Set | 331001032. |
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3310-01033 | Gauge, Pressure -30-100Psi Model JK 50 | 331001033. |
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3310-01034 | Gauge, Pressure Set Manometer | 331001034. |
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3310-01035 | Gauge, Pressure Set Span Instrument Mod IPS122 #1863892 | 331001035. |
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3310-01036 | Gauge, Pressure Set. Span Instruments Model IPS122 | 331001036. |
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3310-01042 | Liquid Gauge 0-200 P | 331001042. |
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3310-90003 | Gauge, Ionization, Type 572, Bayard-Alpert | 331090003. |
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3320-01032 | Gasket, Spira-Shield, High Etch E5500 | 332001032. |
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3320-01033 | Gasket, Spira-Shield 3132 Etch E5500 | 332001033. |
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3320-02241 | Gasket, 6" CFF OFHC Copper, PVD Window Conflat 55 | 332002241. |
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3320-90034 | Gasket, Graphite to AMAT Spec | 332090034. |
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3420-90042 | Insulator, Ceramic, Type SM7 | 342090042. |
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3420-90045 | Bush, Insulator. Type SF3, Ceramic | 342090045. |
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3420-90046 | Bush, Insulator. Type SM3, Ceramic | 342090046. |
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3420-90056 | Bead, Insulator | 342090056. |
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3420-90057 | Bush, Insulator | 342090057. |
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3420-90088 | Bush, Insulator. Type SF11, Ceramic | 342090088. |
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3500-90011 | Nut, Full, Hex M3 | 350090011. |
![]() | 3500-90012 | Nut, M4, S/S | 350090012. |
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3550-01057 | Rotation pin | 355001057. |
![]() | 3620-01018 | Pump Cryo Adsorbing | 362001018. |
![]() | 3630-01083 | Retainer Ring External D (Part of Kit 0240-23703) | 363001083. |
![]() | 3630-01092 | Retainer Ring Inernal 5 (Part of Kit 0240-23703) | 363001092. |
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3690-01121 | Screw, Upper lid can Etch E | 369001121. |
![]() | 3690-01263 | Screw, PANHEAD 8-32 X 1/2" 5.5 | 369001263. |
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3690-01448 | SCR CAP FLT HD 2-56 X 1 | 369001448. |
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3690-01451 | Screw, Vented | 369001451. |
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3690-01458 | 832 X 3 /8 Soc Cap Vent SS COC | 369001458. |
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3690-01478 | Screw, SOC HD.8-32X1/4 | 369001478. |
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3690-01545 | Screw | 369001545. |
![]() | 3690-01869 | Screw, Cap Socket Head (Part of Kit 0240-23703) | 369001869. |
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3690-01903 | Screw, Cap Preclean 5500 | 369001903. |
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3690-02569 | Screw, Shield Preclean 2 55 | 369002569. |
![]() | 3690-02848 | Screw, Cap Flat Head (Part of Kit 0240-23703) | 369002848. |
![]() | 3690-02967 | Screw, Cap Flat Head (Part of Kit 0240-23703) | 369002967. |
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3690-90324 | Screw, M3X6, hex cap head (Allen) | 369090324. |
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3690-90329 | Screw, M3X20, hex skt head (Allen) | 369090329. |
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3690-90433 | Screw, M6x10, Skt, Cap, Stainless steel | 369090433. |
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3690-90520 | Grub Screw, SKT Set Cup Point S/S M2.5x4mm | 369090520. |
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3700-01008 | O-Ring, 7.59x2.62, Viton | 370001008 |
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3700-01011 | O-Ring, 11.11x1.78, Viton | 370001011 |
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3700-01031 | O-Ring, 3.68x1.78, Nitrile | 370001031 |
![]() | 3700-01036 | O-Ring, 12.37x2.62 | 370001036. |
![]() | 3700-01041 | O-Ring, ID 1.171 CS | 370001041. |
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3700-01043 | O-Ring, 42.52x2.62, Viton | 370001043 |
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3700-01058 | O-Ring, 12x2 Viton | 370001058. |
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3700-01068 | O-Ring, 25.07x2.62, Viton | 370001068 |
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3700-01080 | O-Ring, 18.77x1.78, Viton 0.739x0.070" | 370001080 |
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3700-01081 | O-Ring, 52.07x2.62 Viton | 370001081. |
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3700-01083 | O-Ring, 21x2.62 Gas Mixer | 370001083. |
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3700-01087 | Ring, Centering Aluminium/Viton NW40 | 370001087. |
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3700-01088 | Centering ring assembly NW50 | 370001088. |
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3700-01089 | Seal, CTR Ring Assy NW25 Stainless Viton | 370001089. |
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3700-01093 | O-Ring, 26.64x2.62 Viton | 370001093. |
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3700-01094 | O-Ring, 9.19x2.62, Viton | 370001094 |
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3700-01118 | O-Ring, 26.58x3.53, Viton | 370001118 |
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3700-01127 | O-Ring, 209.22x2.62 | 370001127. |
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3700-01131 | O-Ring, 56.82x2.62 Viton | 370001131. |
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3700-01134 | O-Ring, 171.05x3.53, Viton | 370001134 |
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3700-01136 | O-Ring, 456.06x5.33 | 370001136. |
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3700-01163 | O-Ring, 2.9x1.78, Viton | 370001163 |
![]() | 3700-01164 | O-Ring, 26.7x1.78, Viton | 370001164. |
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3700-01165 | O-Ring, 39.34x2.62 Viton 1.549x0.103" | 370001165 |
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3700-01171 | O-Ring, 145.42x6.99 | 370001171. |
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3700-01211 | O-Ring, 196.4x3.53 (Cathode (Bottom)) | 370001211 |
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3700-01223 | O-Ring, 215.49x3.53 Etch CH BTM | 370001223. |
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3700-01225 | O-Ring, 50.80x3.53 Viton | 370001225. |
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3700-01227 | O-Ring, 45.69x2.62, Viton (Pump Flange) | 370001227 |
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3700-01239 | O-Ring, 64.77x2.62 Viton | 370001239. |
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3700-01245 | O-Ring, 9.25x1.78, Viton | 370001245 |
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3700-01258 | O-Ring, 50.52x1.78 Viton (2-033) | 370001258. |
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3700-01259 | O-Ring, 34.52x3.53, Nitrile | 370001259 |
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3700-01272 | O-Ring, 266.29x3.53, Viton | 370001272 |
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3700-01335 | O-Ring, 2.90x1.78, 0.114x0.070" | 370001335. |
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3700-01339 | O-Ring, 405.26x3.53 Brown Viton WCVD LID | 370001339. |
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3700-01340 | O-Ring, 9.12x3.53 Brown Viton Cathode | 370001340. |
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3700-01341 | O-Ring, 47.29x2.62 Brown Viton Robot/Drive top seal | 370001341. |
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3700-01347 | O-Ring, 91.67x3.53 Brown Viton | 370001347. |
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3700-01348 | O-Ring, 240.89x3.53 WINDOW S/Elevator A Brown Viton | 370001348. |
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3700-01372 | O-Ring, 36.09x3.53 Brown Viton | 370001372. |
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3700-01426 | O-Ring, 720x5.33 Brown Viton | 370001426. |
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3700-01534 | O-Ring, 10.77x2.62 Chemraz (Kalrez), white, Baratron Manifold | 370001534 |
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3700-01544 | O-Ring, 3.81x1.27 (0.15x0.05") Brown Viton for Shuttle Blade | 370001544. |
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3700-01927 | O-Ring, 355.19x3.53 Kalrez 4079 | 370001927. |
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3700-02431 | O-Ring, 351x3.53 Viton 75 Custom Size 5-073 | 370002431. |
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3700-02436 | O-Ring, 9.19x3.53, Viton 75 | 370002436. |
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3700-02440 | O-Ring, 28.25x2.62, Viton (G30 DAIN Etcher) | 370002440 |
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3700-02441 | O-Ring, 20.3x2.62 | 370002441. |
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3700-02442 | O-Ring, 10.77x2.62, Viton | 370002442 |
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3700-02448 | O-Ring, 9x4 Viton | 370002448. |
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3700-02502 | O-Ring, 10.77x2.62 Kalrez 4079 Ultra Pure | 370002502. |
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3700-02503 | O-Ring, 18.64x3.53 Kalrez 4079 UP | 370002503. |
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3700-02575 | Kit, Repair Type 6075-031C, for Deublin Unions | 370002575. |
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3700-02719 | O-Ring, 44.04x3.53 Brown Viton | 370002719. |
![]() | 3700-02720 | O-Ring, 6.07x1.78 Viton | 370002720. |
![]() | 3700-90005 | O-Ring, 18.64x3.53, Viton | 370090005. |
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3700-90008 | O-Ring, 152x3.53, Viton | 370090008 |
![]() | 3700-90026 | Filter, Deionizing | 370090026. |
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3700-90100 | O-Ring, 72.62x3.53, Viton | 370090100 |
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3700-90110 | O-Ring, 329.57x5.34, Viton | 370090110 |
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3700-90112 | O-Ring, 85.09x5.34, Viton | 370090112 |
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3700-90122 | O-Ring, 107.55x3.53, Viton | 370090122 |
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3700-90135 | Seal, Viton, ISO 100 CO | 370090135 |
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3700-90137 | O-Ring, 113.67x5.33 Viton | 370090137. |
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3700-90148 | Washer, / Seal 6.35/18x2.2 PTFE | 370090148. |
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3700-90196 | O-Ring, 34.52x3.53, green Viton | 370090196. |
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3700-90245 | O-Ring, 104.5x5.7 1043-57 Viton | 370090245. |
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3700-90267 | O-Ring, 266.07x5.34, Viton | 370090267 |
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3720-00124 | Gasket, Spira-Shield, type NL-103-NC | 372000124. |
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3780-00035 | Spring, 91.4mm dia, 57.15 long, 1.02 wide | 378000035. |
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3780-01062 | Bendix Fexture Pivot | 378001062. |
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3780-90089 | Spring | 378090089. |
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3780-90110 | Spring, compression | 378090110. |
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3780-90121 | Valve, solenoid, (Temescal) | 378090121. |
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3790-00337 | Spacer, Hex, M4x10mm Tapped | 379000337. |
![]() | 3840-01008 | Tape, AMT2000 Silicon rubber.(9 | 384001008. |
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3870-01109 | Valve, Pneumatic 1/2. Colman MK-2690 | 387001109. |
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3870-01171 | Valve, Bellow Sealed | 387001171. |
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3870-01458 | Seal, Rough/V Conflat PVD E | 387001458. |
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3870-98020 | Valve, Soft Start, PN | 387098020. |
![]() | 3880-01004 | Washer, Flat #4 St/St (Part of Kit 0240-23703) | 388001004. |
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3880-01007 | Washer, flat. Lid cover. CVD CHM | 388001007. |
![]() | 3880-01022 | Washer, Locking Split #4 (Part of Kit 0240-23703) | 388001022. |
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3880-01215 | Washer, flat, Teflon, .375"ODx.161"IDx.062"thick | 388001215. |
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3880-01309 | Washer, Lock Pre-clean 5501 | 388001309. |
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3880-90020 | Washer, M3, plain | 388090020. |
![]() | 3880-90021 | Washer, M4, plain | 388090021. |
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3880-90029 | Washer, M3, Spring | 388090029. |
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3940-90046 | Stud, Slotted Dome, HD 400 series, zinc 440802 | 394090046. |
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3940-90048 | Retainer 82-32-109-20 | 394090048. |
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3940-90058 | Stud, 1/4 turn, 82-12-400-16 (mates with 3940-90059) | 394090058. |
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3940-90059 | Receptacle, 1/4 turn 82-35-302-15 (mates with 3940-90058) | 394090059. |
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4020-01033 | Filter, Air | 402001033. |
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4020-01040 | Filter, in-line, mini Gaskleen, | 402001040. |
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4020-01057 | Mist eliminator | 402001057. |
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4020-01062 | Filter, in-line, mini Gaskleen, 3000psi, 250deg C. .03uM (1/4-TO-1/4) | 402001062. |
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4020-90027 | Filter, In-Line 0,5 Micron | 402090027 |
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4318545EO1 | Ardel Tray Spacer AMT8 | 4318545EO1. |
![]() | 5070-01009 | HI-Vacuum Grease | 507001009. |
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5070-90006 | Oil, Diffusion Pump, DC704 | 507090006. |
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60-2192 | PCB, Input Board 32 CH | 602192 |
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646506 | Insulator, Ceramic. Part of Lamp Module | 646506. |
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660-01021 | PCB, HF Timing | 66001021 |
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660-01023 | PCB, 128K CMOS Memory | 66001023 |
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660-01026 | PCB, Inverter Gate Drive | 66001026 |
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660-01029 | PCB, Serial Card Power Board Assy | 66001029 |
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660-01030 | PCB, Quad Serial | 66001030 |
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660-01034 | PCB, Interface Board | 66001034 |
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660-01037 | Test Board Extender | 66001037 |
![]() | 673405 | Shield, heat passivation | 673405. |
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7250-01900 | O-Ring, 19x2.6 Viton | 725001900. |
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7250-04400 | O-Ring, 17.17x1.78, Nitrile | 725004400 |
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73-10187-00 | Belt, MT TRK 3/16 5500 AL55 | 731018700. |
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730-01003 | Transformer, Inverter, Water Cooled | 73001003 |
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820-01001 | H2 Detector 0730-01003 | 82001001 |
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9010-00518 | Pick up loop assembly | 901000518. |
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9150-00682 | Booster, HF CBLS, with Connector | 915000682. |
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9150-01031 | Cable, assembly, with positive limit sensor | 915001031. |
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9240-04161 | Kit, HD-PFS Head, 67% Spares. Packed in Clean Room 1000 | 924004161. |
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9240-04161TCCA | Kit, HD-PFS Head, 67% Spares. Packed in Clean Room 1000 | 924004161TCCA |
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999210 | Vaccum Pump | 999210. |
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A117114 | Tool, Target Removal (made by Hummel) | A117114. |
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AM2720A | Microwave Control Module (603777) | AM2720A. |
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GLFPF3000MFC9 | Filter, in line gas, SST, mini Gaskleen, 3000psi, 250deg C. .03uM (1/4-TO-1/4) | GLFPF3000MFC9. |
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SLA7A250V-1C9 | Switch, push on, push off, SLA7A250V-1C9 | SLA7A250V1C9. |
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UD01-022 | Spinner motor servo module SMBM4-AF (DNS Etcher) | UD01022 |